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*[[Specific Process Knowledge/Etch/DRIE-Pegasus/SOIetch|SOI etch]]
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/SOIetch|SOI etch]]


== Other processes ==
'''Other etch processes'''


*[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch]]


*[[Specific Process Knowledge/Etch/DRIE-Pegasus/slopedsidewalls|Etches that produce positively sloped sidewalls for imprinting purposes]]


=== Nanoetching ===
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/Waferthinning| Maskless reduction of wafer thicknesses]]
 
[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch]]
 
=== Wafer thinning ===
 
=== Sloped sidewalls ===
For injection molding purposes
 
 
== Processing challenges ==
 
=== Bonded wafers ===
 
== User manuals ==
 
* The Danchip user manual from LabManager is found [http://labmanager.danchip.dtu.dk/machine/machine_item.php?refpage=machlist&id=265 >Here<].
* The user manual provided by SPTS can be found here [[Media:SPTS Pegasus user manual.pdf|>HERE<]]


== Hardware information ==
== Hardware information ==
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus"