Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
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*Low vacuum (min. 2/3 mbar) | *Low vacuum (min. 2/3 mbar) | ||
|style="background:WhiteSmoke; color:black;" align="left"|5/6 mbar, if minimum gas flow during process. | |style="background:WhiteSmoke; color:black;" align="left"|5/6 mbar, if minimum gas flow is used during process. | ||
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!style="background:Silver; color:black" align="center" align="center" rowspan="3"|Process time | !style="background:Silver; color:black" align="center" align="center" rowspan="3"|Process time | ||