Specific Process Knowledge/Characterization/Profiler/Apex software

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Apex software outside the cleanroom

The Tencor-KLA P17 stylus profiler comes with advanced data analysis software called APEX. We have an extra license for the software installed on a computer called NTCH-D0186 at Nanolab. The computer is currently located in the basement of building 346 in room 904. You will find it at the back of the room between the ALD and the PowderXRD.

On the NTCH-D0186 desktop, you will find a shortcut to the APEX software. Access your data on the M drive, O drive or through files.dtu.dk and open it up with the software.

Remote access the analysis computer

Remote access to the Apex program is a little bit complicated. This is because the Apex program doesn't recognize the license dongle if you simply use Remote desktop.

How to open Apex on the analysis computer

• Connect to DTU's network by VPN (usually necessary even if you are physically located at DTU). Use the service Cisco AnyConnect Secure Mobility Client. Connect to AIT Extra-VPN with your usual credentials.

• Connect to the computer NTCH-D0186 with the Remote Desktop Connection app on Windows (in Danish it's called Fjernskrivebord). Again log on with your DTU credentials. If someone else is logged in, try again a bit later.

• On the NTCH-D0186 computer, open TeamViewer (it is pinned to the task bar).

• Close the Remote Desktop Connection and open TeamViewer on your own computer. You can download Teamviewer from www.teamviewer.com. We have a number of pro licenses, which you can obtain by writing to our IT administrator, Thøger Eskildsen (thes@dtu.dk). If you are a student or just want to try it out, you can use the free version.

• Use TeamViewer on your own computer to log on to the analysis computer. Under "Control Remote Computer" put in the computer name 631 851 324. The password is DTU_Nanolab. You will subsequently need to login to the computer with your DTU credentials as though you were physically present in front of it. Now you can open and use the APEX software with the shortcut on the Desktop.

• IMPORTANT: Remember to close the connection after use.

How to use the software

There are a number of tutorials on how to use APEX and a thorough help document which you will find when you open the program. There is also a small introduction as an appendix to the P17 help document.

Notice it's important to have the data in a format that Apex can open. For line profiles that means you have to open the data in the Profiler Software first (on the P17 computer in the cleanroom, at least until further notice), press the Apex button and save it in Apex in a native format. It is also possible to check a box in the profiler scan recipe that makes it possible to open the data in Apex automatically (see the Profiler Help document for more details or ask staff). Finally some data formats (e.g., 3D maps and stress data) can always be opened in Apex.

Apex offers many formats for saving the data in nice reports and various options for exporting data.

If APEX has automatically generated a surface from your line profiles of data, it is possible to view the underlying profiles by right-clicking on the surface and choosing Points Drawing instead of Lines Drawing or finding the same option (Points drawing) in the top ribbon.

If you learn something cool about Apex that you'd like to share, please let us know.

Best of luck and please contact thinfilm@dtu.dk if you have any questions or helpful tips.