Specific Process Knowledge/Characterization/Profiler/Apex software

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Apex software outside the cleanroom

The Tencor-KLA P17 stylus profiler comes with advanced data analysis software called APEX. We have an extra license for the software installed on a computer called NTCH-D0186 at Nanolab. The computer is currently located in the basement of building 346 in room 904. You will find it at the back of the room between the ALD and the PowderXRD.

On the NTCH-D0186 desktop, you will find a shortcut to the APEX software. Access your data on the M drive, O drive or through files.dtu.dk and open it up with the software.

Remote access the analysis computer

Remote access to the Apex program is unfortunately a little bit complicated. You will need Cisco Anyconnect to connect to DTU's network by VPN, the Windows Remote Desktop application and yet another VPN application called TeamViewer. This is because the Apex program doesn't recognize it's license dongle if you simply use Remote desktop.

We have a number of pro licenses for TeamViewer which you can obtain by writing to our IT administrator, Thøger Eskildsen (thes@dtu.dk). If you are a student or just want to try it out, you can use a free version.

How to open Apex on the analysis computer

• Connect to DTU's network by VPN. This is usually necessary even if you are physically located at DTU.

For this you can use the service Cisco AnyConnect Secure Mobility Client. Connect to AIT Extra-VPN with your usual credentials.

• Make a remote desktop connection to the computer NTCH-D0186.

For this you can use the Remote Desktop Connection app on Windows. In Danish it's called Fjernskrivebord. Again log on with your own credentials. If someone else is logged in, try again a bit later.

• On the NTCH-D0186 computer, open TeamViewer (it is pinned to the task bar).

• Close the Remote Desktop Connection and open TeamViewer on your own computer.

You can download Teamviewer from www.teamviewer.com. As mentioned above, write to Nanolab staff to request a pro license.

• Now use TeamViewer on your own computer to log on to the analysis computer. Under "Control Remote Computer" put in the computer name 631 851 324. The password is DTU_Nanolab. You may subsequently need to login to the computer with your DTU credentials as though you were physically present in front of it.

• Now you can open and use the APEX software with the shortcut on the Desktop.

• IMPORTANT: Remember to close your connection after use.

How to use the software

There are a number of tutorials on how to use APEX and a thorough help document which you will find when you open the program. There is also a small introduction as an appendix to the P17 help document.

Notice it's important to have the data in a format that Apex can open. For line profiles that means you have to open the data in the Profiler Software first and open it up in Apex and save it in a native format OR check the box in the profiler program that makes it possible to export the data automatically.

From Apex there are many ways and formats for saving data in this program - notice whether the format you have chosen will be useful for your later needs.

If APEX has automatically generated a surface from your line profiles of data, it is possible to view the underlying profiles by right-clicking on the surface and choosing Points Drawing instead of Lines Drawing or finding the same option (Points drawing) in the top ribbon.

If you learn something cool that you'd like to share, please let us know.

Best of luck and please contact thinfilm@dtu.dk if you have any questions.