Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3: Difference between revisions

Revision as of 11:48, 4 November 2020 view source Jmli (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 4,579 edits →Acceptance test ← Older edit		Revision as of 16:55, 16 November 2020 view source Jmli (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 4,579 edits →Pegasus 3 - 150mm silicon etching Newer edit →
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	'''The tool is already installed and ready to process. '''		'''The tool is already installed and ready to process. '''

	[[Image:~~Twinx~~.jpg \|frame\|left\|x300px\|The ~~twin Pegasi~~ (3 and ~~4) have just been rolled into the lab on July 3rd 2018~~. ]]		[[Image:05x.jpg \|frame\|left\|x300px\|The Pegasus 3 cassette station (left), operator station (center) and support computer with Picoscope process monitoring. ]]