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| =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
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| '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_microscope click here]''' | | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_microscope click here]''' |
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| [[Category: Equipment|Characterization Optical mi]] | | [[Category: Equipment|Characterization Optical mi]] |
| [[Category: Characterization|Optical mi]] | | [[Category: Characterization|Optical mi]] |
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| {| border="1" cellspacing="0" cellpadding="3"
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| !
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| ! Zeiss Jenatech (strain)
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| ! Nikon SMZ 1500
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| ! Leica S8 APO
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| ! Leitz Medilux
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| ! Zeiss Axiotron 2
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| ! Zeiss Jenatech (particles measurements)
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| ! Noco IR microscope
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| ! Nikon SMZ 1000
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| ! Nikon ME 600
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| ! Nikon Eclipse L200
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| ! Nikon Eclipse L200 (2)
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| ! Nikon ECLIPSE L200N 3
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| ! Nikon ECLIPSE L200N 4
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| |-
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| |[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|left]]
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| [[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|left]]
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| |[[image:Nikon SMZ 1500.jpg|100x100px|thumb|left]]
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| |[[image:Leica S8 APO.jpg|100x100px|thumb|left]]
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| |[[image:Leitz Medilux.jpg|100x100px|thumb|left]]
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| |[[image:Zeiss Axiotron.jpg|100x100px|thumb|left]]
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| [[image:Zeiss Axiotron_1.jpg|100x100px|thumb|left]]
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| |[[image:Zeiss Jenatech particle measurement_2.jpg|100x100px|thumb|left]]
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| [[image:Zeiss Jenatech particle measurement_1.jpg|100x100px|thumb|left]]
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| |[[image:Noco IR microscope.jpg|100x100px|thumb|left]]
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| [[image:Noco IR microscope_1.jpg|100x100px|thumb|left]]
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| |[[image:Nikon SMZ 1000.jpg|100x100px|thumb|left]]
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| ||[[image:Nikon ME 600.jpg|100x100px|thumb|left]]
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| [[image:Nikon ME 600_1.jpg|100x100px|thumb|left]]
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| |[[image:Nikon Eclipse L200.jpg|100x100px|thumb|left]]
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| [[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|left]]
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| |[[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|left]]
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| [[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|left]]
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| |[[File:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|left]]
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| |[[File:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|left]]
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| |-
| |
| |'''Location'''
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |-
| |
| |'''Special features'''
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| |Wollastron prism
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| |Stereoscopic microscope
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| |Stereoscopic microscope
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| |No
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| |No
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| |No
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| |Infra red (IR) camera
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| |Stereoscopic microscope
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| |Wollastron prism
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| |Motorized stage
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| [[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|auto scan guide]]
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| |No
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| |No
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| |No
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| |-
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| |'''Ocular magnification'''
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| |10x
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| |No
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| |No
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| |10x
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| |10x
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| |10x
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| |10x
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| |No
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| |10x
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| |10x
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| |10x
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| |10x
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| |10x
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| |-
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| |'''Objective magnification'''
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| |2.5x, 5x, 10x, 20x, 50x
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| |Zoom 100x
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| |Zoom 80x
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| |2.5x, 5x, 10x, 20x, 50x
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| |5x, 10x, 20x, 50x
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| |5x, 10x, 20x, 50x, 100x
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| |2.5x, 5x, 20x, 50x
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| |Zoom 100x
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| |5x, 10x, 20x, 50x, 100x
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| |2.5x, 5x, 10x, 20x, 50x, 100x
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| |2.5x, 5x, 10x, 20x, 50x, 100x
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| |2.5x, 5x, 10x, 20x, 50x, 100x
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| |2.5x, 5x, 10x, 20x, 50x, 100x
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| |-
| |
| |'''Bright field'''
| |
| |Yes
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| |No
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| |No
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |No
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |-
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| |'''Dark field'''
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| |Yes
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| |No
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| |No
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| |No
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| |Yes
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| |Yes
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| |No
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| |No
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |-
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| |'''Polarizer'''
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| |Yes
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| |No
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| |No
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| |No
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| |No
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| |Yes
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| |No
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| |No
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| |Yes
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| |No
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| |No
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| |No
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| |No
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| |-
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| |'''Episcopic light (reflected light)'''
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |-
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| |'''Diascopic light (transmitted light)'''
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| |No
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| |Yes
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| |No
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| |Yes
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| |Yes
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| |No
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| |Yes
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| |No
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| |No
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |-
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| |'''View with eye'''
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |-
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| |'''View on screen (camera)'''
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| |Yes
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| |No
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| |No
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| |Yes
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| |Yes
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| |No
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| |Yes (IR)
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| |No
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |-
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| |'''Measurement option'''
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| |No
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| |No
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| |No
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| |No
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| |Yes
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| |No
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| |No
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| |No
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| |No
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |-
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| |}
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| It is possible to make an automated scanning of a full wafer on the Nikon Eclipse L200 with motorized stage '''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Nikon Eclipse L200 auto scan guide]]'''
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| =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
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|
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| {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
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| |-
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| |-style="background:white; color:black; vertical-align:middle; text-align:center;"
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| !Microscope
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| !Location
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| !Responsible Group
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| !Objectives
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| !Ocular
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| !Special features
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| !Features
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| !Camera
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| !Analysis software
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| |-
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|
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| |-
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| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
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| !Nikon SMZ 1000[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
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| |346-901
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| |Wet chemistry
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| |Zoom 0.8x - 8x
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| |10x
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| |Stereoscopic microscope
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| |Episcopic
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| |No
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| |No
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| |-
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|
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| |-
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| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
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| !Noco IR[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]]
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| |346-901
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| |Wet chemistry
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| *2.5x
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| *10x
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| *20x
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| *50x
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| |10x
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| |IR imaging
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| |
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| *Polarizer
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| *Episcopic
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| *Diascopic
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| *Brightfield
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| |IR camera
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| |No
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| |-
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|
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| |-
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| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
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| !Leica INM100[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
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| |346-901
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| |Wet chemistry
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| *2.5x
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| *5x
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| *10x
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| *20x
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| *50x
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| |10x
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| |
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| |
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| *Episcopic
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| *Diascopic
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| *Brightfield
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| *Darkfield
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| |DS-Fi2
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| |NIS-D
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| |-
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|
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| |-
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| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
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| !Nikon Eclipse L200 #2[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]]
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| |C1
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| |Thin Film
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| |
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| *2.5x
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| *5x
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| *10x
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| *20x
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| *50x
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| *100x
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| |10x
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| |
| |
| |
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| *Episcopic
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| *Diascopic
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| *Brightfield
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| *Darkfield
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| |DS-Fi1
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| |NIS-D
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| |-
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|
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| |-
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| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
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| !Zeiss Jenatech[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]]
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| |C1
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| |Thin Film
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| |
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| *5x
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| *10x
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| *20x
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| *50x
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| *100x
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| |10x
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| |
| |
| |
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| *Polarizer
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| *Episcopic
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| *Diascopic
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| *Brightfield
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| |No
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| |No
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| |-
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|
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| |-
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| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
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| !Nikon Eclipse L200 #1[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]]
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| |D3
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| |Thin Film
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| |
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| *2.5x
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| *5x
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| *10x
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| *20x
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| *50x
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| *100x
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| |10x
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| |
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| *Motorized stage
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| *'''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Auto scan guide]]'''
| |
| |
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| *Episcopic
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| *Diascopic
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| *Brightfield
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| *Darkfield
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| |DS-Fi1
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| |NIS-BR
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| |-
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|
| |
| |-
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| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
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| !Leitz Medilux[[image:Leitz Medilux.jpg|100x100px|thumb|center]]
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| |D3
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| |Thin Film
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| |
| |
| *2.5x
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| *5x
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| *10x
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| *20x
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| *50x
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| |10x
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| |
| |
| |
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| *Episcopic
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| *Diascopic
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| *Brightfield
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| |DX40-274FW
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| |Kappa Control Center
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| |-
| |
|
| |
| |-
| |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
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| !Nikon Eclipse L200N #3[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]]
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| |E4
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| |Lithography
| |
| |
| |
| *2.5x
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| *5x
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| *10x
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| *20x
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| *50x
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| *100x
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| |10x
| |
| |
| |
| |
| |
| *Polarizer
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| *Episcopic
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| *Diascopic
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| *Brightfield
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| *Darkfield
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| |
| |
| *DS-Fi2
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| *C-mount, 0.7x relay
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| |NIS-D
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| |-
| |
|
| |
| |-
| |
| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
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| !Nikon Eclipse L200N #4[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]]
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| |E5
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| |Lithography
| |
| |
| |
| *2.5x
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| *5x
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| *10x
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| *20x
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| *50x
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| *100x
| |
| |10x
| |
| |
| |
| |
| |
| *Polarizer
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| *Episcopic
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| *Diascopic
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| *Brightfield
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| *Darkfield
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| |
| |
| *DS-Fi2
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| *C-mount, 0.7x relay
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| |NIS-D
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| |-
| |
|
| |
| |-
| |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
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| !Nikon ME 600[[image:Nikon ME 600.jpg|100x100px|thumb|center]][[image:Nikon ME 600_1.jpg|100x100px|thumb|center]]
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| |F1
| |
| |Thin Film
| |
| |
| |
| *5x
| |
| *10x
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| *20x
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| *50x
| |
| *100x
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| |10x
| |
| |
| |
| |
| |
| *Polarizer
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| *Episcopic
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| *Brightfield
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| *Darkfield
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| |DS-Fi2
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| |NIS-D
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| |-
| |
|
| |
| |-
| |
| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
| |
| !Leica S8 APO[[image:Leica S8 APO.jpg|100x100px|thumb|center]]
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| |F2
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| |Thin Film
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| |Zoom 1x - 8x
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| |10x
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| |Stereoscopic microscope
| |
| |Episcopic
| |
| |No
| |
| |No
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
| |
| !Zeiss Axiotron[[image:Zeiss Axiotron.jpg|100x100px|thumb|center]][[image:Zeiss Axiotron_1.jpg|100x100px|thumb|center]]
| |
| |F3
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| |Lithography
| |
| |
| |
| *5x
| |
| *10x
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| *20x
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| *50x
| |
| |10x
| |
| |
| |
| |
| |
| *Episcopic
| |
| *Diascopic
| |
| *Brightfield
| |
| *Darkfield
| |
| |Infinity X
| |
| |DeltaPix
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| |-
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|
| |
| |}
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|
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| <br clear="all" />
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|
| |
| =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
| |
|
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|
| {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" | | {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" |