Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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When running any recipe on the SPTS Pro software, a set of process parameters are recorded (defined in the logging recipe that can be modified like any other recipe) as the process runs. This data can be accessed later by looking up the datalog. During the process itself, one can also activate the 'Trace' to monitor the process parameters in real time. To the left in the figure below, some of the most important process parameters are shown for a process run of the recipe Process A. | When running any recipe on the SPTS Pro software, a set of process parameters are recorded (defined in the logging recipe that can be modified like any other recipe) as the process runs. This data can be accessed later by looking up the datalog. During the process itself, one can also activate the 'Trace' to monitor the process parameters in real time. To the left in the figure below, some of the most important process parameters are shown for a process run of the recipe Process A. | ||
<gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2"> | <gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2"> | ||
image:Process A SPTS.png | Left: Recorded with the SPTS software | image:Process A SPTS.png | Left: Recorded with the SPTS software | ||
image:Process A pico.png | Right: Recorded with the Picoscope | image:Process A pico.png | Right: Recorded with the Picoscope | ||
</gallery> | </gallery> | ||
One can see the multiplexing of the Bosch process by alternation of the gas flows of | |||
<span style="color:#FFFFFF; background:blue">SF<sub>6</sub></span> and <span style="background:red">C<sub>4</sub>F<sub>8</sub></span> | |||
<gallery caption="4 cycles of Process D4 " widths="400" heights="500" perrow="2"> | <gallery caption="4 cycles of Process D4 " widths="400" heights="500" perrow="2"> | ||
Image:PrD4 SPTS.png | Left: Recorded with the SPTS software | Image:PrD4 SPTS.png | Left: Recorded with the SPTS software | ||