Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/UVExposure#Aligner:_MA6_-_2|Aligner: MA6 - 2]]</b> | |style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/UVExposure#Aligner:_MA6_-_2|Aligner: MA6 - 2]]</b> | ||
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/UVExposure#Aligner: Maskless 01|Aligner: Maskless 01]]</b> | |style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/UVExposure#Aligner: Maskless 01|Aligner: Maskless 01]]</b> | ||
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/UVExposure#Aligner: Maskless 02|Aligner: Maskless 02]]</b> | |||
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/UVExposure#Inclined UV Lamp|Inclined UV Lamp]]</b> | |style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/UVExposure#Inclined UV Lamp|Inclined UV Lamp]]</b> | ||
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*Top Side Alignment | *Top Side Alignment | ||
*Maskless UV exposure | |||
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*Top Side Alignment | |||
*Back Side Alignment | |||
*Maskless UV exposure | *Maskless UV exposure | ||
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*2µm down to 1µm | *2µm down to 1µm | ||
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*1µm down to 0.6µm | |||
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*365nm LED | *365nm LED | ||
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*375nm laserdiodes | |||
or | |||
*405nm laserdiodes | |||
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*1000 W Hg-Xe lamp | *1000 W Hg-Xe lamp | ||
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*proximity, soft, hard, vacuum contact | *proximity, soft, hard, vacuum contact | ||
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*Projection | |||
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*Projection | *Projection | ||
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*1 100 mm wafer | *1 100 mm wafer | ||
*1 150 mm wafer | *1 150 mm wafer | ||
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*1 small sample, down to 3x3 mm<sup>2</sup> | |||
*1 50 mm wafer | |||
*1 100 mm wafer | |||
*1 150 mm wafer | |||
*1 200 mm wafer | |||
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*all sizes up to 8inch | *all sizes up to 8inch | ||
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*All cleanroom materials except copper and steel | *All cleanroom materials except copper and steel | ||
*Dedicated chuck for III-V materials | *Dedicated chuck for III-V materials | ||
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*All cleanroom materials | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*All cleanroom materials | *All cleanroom materials | ||