Specific Process Knowledge/Thin film deposition/Deposition of Titanium Oxide

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Deposition of Titanium Oxide

Titanium oxide can be deposited either by a sputter technique or by use of ALD (atomic layer deposition). At the moment the only system where we have a target for Titanium oxide is IBE/IBSD Ionfab300. The target is Ti. During the sputter deposition oxygen is added to the chamber resulting in Titanium oxide on the sample.

• TiO2 made on IBE/IBSD Ionfab300
• TiO2 deposition using ALD

Comparison of the methods for deposition of Titanium Oxide

	Sputter technique using IBE/IBSD Ionfab300	Sputter System Lesker	III-V Dielectric evaporator	ALD Picosun 200
Generel description	TiO2 created from a Ti sputter target. By adding oxygen during the deposition TiO2 is created.	Reactive DC sputtering of Ti target in Ar/O2 (10% O2) plasma. RF sputtering of TiO2 target	E-beam evaporation of TiO2	ALD (atomic layer deposition) of TiO2
Stoichiometry	Can probably be varied (sputter target: Ti, O2 added during deposition)	unknown	unknown	Temperature dependent - Anatase or amorphous TiO2
Film Thickness	~10 nm - ~0.5 µm (>2h)	~10 nm - ~0.5 µm (>2h)	~10 nm - ~200 nm	0 nm - 100 nm
Deposition rate	3.0-3.5nm/min (reactive DC sputtering)	3 - 5 nm/min (RF sputtering) 0.3 - 0.5nm/min	1 - 2 Å/s	0.40 nm/min - 0.06 nm/cycle (very recipe and temperature dependent)
Step coverage	Not Known	Not Known	Not Known	Very good. Covers sample everywhere (but long purge time needed for very high aspect ratio structures)
Process Temperature	Expected to be below 100oC	Done at RT. There is a possibility to run at higher temperatures	Sample temperature can be set to 20-250 oC	120oC - 150oC: Amorphous TiO2 300oC - 350oC: Anatase TiO2
More info on TiO2	TiO2 made on IBE/IBSD Ionfab300			ALD1: TiO2 deposition using ALD1 ALD2: TiO2 deposition using ALD2
Substrate size	1 50mm wafer 1 100mm wafer 1 150mm wafer 1 200mm wafer Smaller pieces can be mounted with capton tape	several small samples several 50 mm wafers (Ø150mm carrier) 1x 100 mm wafers 1x 150 mm wafers	1x 2" wafer or several smaller samples	ALD1: 1-5 100 mm wafers 1-5 150 mm wafers 1 200 mm wafer Several smaller samples ALD2: 1 100 mm wafer 1 150 mm wafer 1 200 mm wafer Several smaller samples
Allowed materials	Almost any materials not Pb and very poisonous materials	Almost any materials Pb and poisonous materials only after special agreement		Silicon Silicon oxide, silicon nitride Quartz/fused silica Metals - Use a dedicated carrier wafer III-V materials - Use dedicated carrier wafer Polymers - Depending on the melting point/deposition temperature, use dedicated carrier wafer. Ask for permission