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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Line 84: Line 84:
! style="background:Whitesmoke; color:black" | Hardware options
! style="background:Whitesmoke; color:black" | Hardware options
| style="background:WhiteSmoke; color:black" |  
| style="background:WhiteSmoke; color:black" |  
* Picoscope oscilloscope
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|High flow plenum]]
* Claritas endpoint system
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope|Picoscope oscilloscope]]
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/Claritas|Claritas optical endpoint system]]
| style="background:WhiteSmoke; color:black"|
| style="background:WhiteSmoke; color:black"|
*Picoscope oscilloscope
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|High flow plenum]]
| style="background:WhiteSmoke; color:black"| ?
| style="background:WhiteSmoke; color:black"| ?
| style="background:WhiteSmoke; color:black"| ?
| style="background:WhiteSmoke; color:black"| ?
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