Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions
| Line 61: | Line 61: | ||
| 1,4623 | | 1,4623 | ||
| 311 | | 311 | ||
| | | 6,22*10<sup>-3</sup> | ||
|- | |- | ||
! 7 | ! 7 | ||
| Line 68: | Line 68: | ||
| 1,4622 | | 1,4622 | ||
| 138,5 | | 138,5 | ||
| | | 4,85*10<sup>-3</sup> | ||
|- | |- | ||
! 11 | ! 11 | ||
| Line 75: | Line 75: | ||
| 1,4625 | | 1,4625 | ||
| 16,1 | | 16,1 | ||
| | | 1,29*10<sup>-3</sup> | ||
|- | |- | ||
! 15 | ! 15 | ||
| Line 82: | Line 82: | ||
| 1,4624 | | 1,4624 | ||
| 7,4 | | 7,4 | ||
| 0, | | 0,89*10<sup>-3</sup> | ||
|- | |- | ||
! 19 | ! 19 | ||
| Line 89: | Line 89: | ||
| 1,4623 | | 1,4623 | ||
| 6,6 | | 6,6 | ||
| | | 1,49*10<sup>-3</sup> | ||
|- | |- | ||
|} | |} | ||
| Line 115: | Line 115: | ||
| 1,4654 | | 1,4654 | ||
| 189,7 | | 189,7 | ||
| | | 3,79*10<sup>-3</sup> | ||
|- | |- | ||
! 6 | ! 6 | ||
| Line 122: | Line 122: | ||
| 1,4629 | | 1,4629 | ||
| 101,6 | | 101,6 | ||
| | | 3,56*10<sup>-3</sup> | ||
|- | |- | ||
! 9 | ! 9 | ||
| Line 129: | Line 129: | ||
| 1,4604 | | 1,4604 | ||
| 10,0 | | 10,0 | ||
| 0, | | 0,8*10<sup>-3</sup> | ||
|- | |- | ||
! 14 | ! 14 | ||
| Line 136: | Line 136: | ||
| 1,4651 | | 1,4651 | ||
| 4,72 | | 4,72 | ||
| 0, | | 0,57*10<sup>-3</sup> | ||
|- | |- | ||
! 18 | ! 18 | ||
| Line 143: | Line 143: | ||
| 1,4659 | | 1,4659 | ||
| 3,23 | | 3,23 | ||
| 0, | | 0,73*10<sup>-3</sup> | ||
|- | |- | ||
! Blank Si wafer | ! Blank Si wafer | ||