Template:Maximus: AZ5214E: Difference between revisions
New page: Maximus can be used for spinning on 2", 4" and 6" substrates. Right now we only have few recipes for the standard thicknesses, but we are working at it. Please address you suggestions to P... |
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Maximus can be used for spinning on 2", 4" and 6" substrates. | Maximus can be used for spinning on 2", 4" and 6" substrates. | ||
Right now we only have few recipes for the standard thicknesses, but we are working at it. Please address you suggestions to Photolith Team in case you have some special needs. | Right now we only have few recipes for the standard thicknesses, but we are working at it. Please address you suggestions to Photolith Team in case you have some special needs. | ||
* for 4" substrates 1,5 um resist use | * for 4" substrates 1,5 um resist use flow 1,5 4inch | ||
* for 6" substrates 1,5 um resist use | * for 6" substrates 1,5 um resist use flow 1,5 6inch | ||
For the flow description read this [[media:Maximus_recipe_for_1,5um_resist.doc|document]]. | |||
Revision as of 12:01, 5 November 2007
Maximus can be used for spinning on 2", 4" and 6" substrates. Right now we only have few recipes for the standard thicknesses, but we are working at it. Please address you suggestions to Photolith Team in case you have some special needs.
- for 4" substrates 1,5 um resist use flow 1,5 4inch
- for 6" substrates 1,5 um resist use flow 1,5 6inch
For the flow description read this document.