Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
| Line 15: | Line 15: | ||
*[[/Al sputtering in Sputter System (Lesker) |Al sputtering in Sputter System (Lesker)]] | *[[/Al sputtering in Sputter System (Lesker) |Al sputtering in Sputter System (Lesker)]] | ||
*[[/Al_Sputtering_in_Cluster_Lesker_PC3 |Al Sputtering in Sputter-System Metal-Nitride(PC3)]] | |||
==E-beam evaporation of Aluminium== | ==E-beam evaporation of Aluminium== | ||