Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
| Line 20: | Line 20: | ||
*[[/Al Ebeam evaporation in Temescal |E-beam evaporation of Al in Temescal]] | *[[/Al Ebeam evaporation in Temescal |E-beam evaporation of Al in Temescal]] | ||
*[[/Al sputtering in Sputter System (Lesker) |Al sputtering in Sputter System (Lesker)]] | |||
*[[/Notes on low oxygen content in e-beam prepared Al thin films|Notes on low oxygen content in e-beam prepared Al thin films (Temescal)]] | *[[/Notes on low oxygen content in e-beam prepared Al thin films|Notes on low oxygen content in e-beam prepared Al thin films (Temescal)]] | ||