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Specific Process Knowledge/Thin film deposition/Deposition of Titanium: Difference between revisions

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==Titanium deposition ==
==Titanium deposition ==


Titanium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment. The following sections tell about some properties of evaporated Ti films and the use of Ti as an adhesion layer.
Titanium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment.  
 
The section below the chart elaborates on the use of Ti as an '''adhesion layer'''.




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