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''By Bjarke Thomas Dalslet @Nanotech.dtu.dk''
''By Bjarke Thomas Dalslet @Nanotech.dtu.dk''


The Lesker CMS 18 sputter system can produce films in a wide range of qualities. The quality of a film depends strongly on the substrate (lattice matching), but also on the energy the sputtered material can utilize for annealing.
The Lesker CMS 18 sputter system can produce films in a wide range of crystalline qualities. The crystalline quality of a film depends strongly on the substrate (lattice matching), but also on the energy the sputtered material can utilize for annealing.


You will find detailed information on film quality optimization for NiFe films [[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_NiFe|here]].
You will find detailed information on film quality optimization for NiFe films [[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_NiFe|here]].
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