Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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*Ensure appropriate PID values, since the deposition rate has to be stable during the evaporation. | *Ensure appropriate PID values, since the deposition rate has to be stable during the evaporation. | ||
The full results of the testing can be found here: [[ | The full results of the testing can be found here: [[Media:Au issues with Temescal.pptx]]. | ||
== Process information == | == Process information == | ||