Specific Process Knowledge/Etch/DRIE-Pegasus/SPTSdocs: Difference between revisions
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== Specifically for Pegasus tools == | == Specifically for Pegasus tools == | ||
[[Media:SPTS High Flow Plenum Upgrade for Pegasus Nov 2012.pdf|High Flow Plenum Upgrade]] | [[Media:SPTS High Flow Plenum Upgrade for Pegasus Nov 2012.pdf|High Flow Plenum Upgrade]] | ||
[[Media:Claritas_February_2012.pdf|Claritas Endpoint Detection System]] | [[Media:Claritas_February_2012.pdf|Claritas Endpoint Detection System]] | ||
Revision as of 11:58, 30 July 2018
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SPTS documents on hardware
Hardware Information - Overview.
Hardware Information - Detailed.
The Advantages the Pegasus has over existing Si etchers.
Robot Handling System Information .