Specific Process Knowledge/Etch/DRIE-Pegasus/SPTSdocs: Difference between revisions

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[[Media:Appl-sheets-4_markets.pdf|General Applications]].
[[Media:Appl-sheets-4_markets.pdf|General Applications]].
== Specifically for Pegasus tools ==
[[Media:SPTS High Flow Plenum Upgrade for Pegasus Nov 2012.pdf|High Flow Plenum Upgrade]].

Revision as of 11:46, 30 July 2018

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SPTS documents on hardware

Hardware Information - Overview.

Hardware Information - Detailed.

The Advantages the Pegasus has over existing Si etchers.

Robot Handling System Information .

Process applications

MEMS in Aerospace.

Bio Medical.

MEMS in Energy.

Nanotechnology.

Packaging Applications.

General Applications.

Specifically for Pegasus tools

High Flow Plenum Upgrade.

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