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| * [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-3|DRIE-Pegasus 3 - installation in progress]] | | * [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-3|DRIE-Pegasus 3 - installation in progress]] |
| * [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-4|DRIE-Pegasus 4 - installation in progress]] | | * [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-4|DRIE-Pegasus 4 - installation in progress]] |
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| == Process information ==
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| '''SPTS process notation'''
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| Describing a process recipe on the Pegasus may sometimes be difficult because of the great flexibility of the instrument. A compact and precise notation is therefore required for the recipes. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Notation|'''HERE''']] to find a short description of the official SPTS notation.
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| '''Hardware changes'''
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| A few hardware modifications have been made on the Pegasus since it was installed in 2010. The changes are listed in the table below under hardware options.
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| {| border="2" cellspacing="1" cellpadding="1" align="center"
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| ! style="background:silver; color:black" |
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| ! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1| DRIE-Pegasus 1]]
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| ! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2| DRIE-Pegasus 2]]
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| ! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3| DRIE-Pegasus 3]]
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| ! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4| DRIE-Pegasus 4]]
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| |- valign="top"
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| ! style="background:Whitesmoke; color:black" | Purpose (current or intended)
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| | style="background:WhiteSmoke; color:black" | 4" silicon etch workhorse
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| | style="background:WhiteSmoke; color:black"| Research tool with very limited number of users
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| | style="background:WhiteSmoke; color:black"| 6" silicon etch workhorse
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| | style="background:WhiteSmoke; color:black"| 6" dielectric etcher
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| |- valign="top"
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| ! style="background:lightgrey; color:black" | Manufactured
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| | style="background:lightgrey; color:black" | 2010
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| | style="background:lightgrey; color:black" | 2010
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| | style="background:lightgrey; color:black" | ?
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| | style="background:lightgrey; color:black" | ?
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| |- valign="top"
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| ! style="background:Whitesmoke; color:black" | Serial
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| ! style="background:WhiteSmoke; color:black" | MP0636
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| | style="background:WhiteSmoke; color:black"| MP0641
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| | style="background:WhiteSmoke; color:black"| ?
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| | style="background:WhiteSmoke; color:black"| ?
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| |- valign="top"
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| ! style="background:lightgrey; color:black" | Electrode size
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| | style="background:lightgrey; color:black" | 4"
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| | style="background:lightgrey; color:black" | 6"
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| | style="background:lightgrey; color:black" | 6"
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| | style="background:lightgrey; color:black" | 6"
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| |- valign="top"
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| ! style="background:Whitesmoke; color:black" | Hardware options
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| | style="background:WhiteSmoke; color:black" |
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| * [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|High flow plenum]]
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| * [[Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope|Picoscope oscilloscope]]
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| *[[Specific Process Knowledge/Etch/DRIE-Pegasus/Claritas|Claritas optical endpoint system]]
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| | style="background:WhiteSmoke; color:black"|
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| * [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|High flow plenum]]
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| | style="background:WhiteSmoke; color:black"| ?
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| | style="background:WhiteSmoke; color:black"| ?
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| |-
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| |}
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| ==Equipment performance and process related parameters== | | ==Equipment performance and process related parameters== |
