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Specific Process Knowledge/Thermal Process/C3 Anneal-bond furnace: Difference between revisions

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|style="background:WhiteSmoke; color:black"|Oxidation:
|style="background:WhiteSmoke; color:black"|Oxidation:
*Dry
*Dry
*Wet: with bubbler (water steam + N<math>_2</math>)
*Wet: with bubbler (water steam + N<sub>2</sub>)
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!style="background:silver; color:black" align="left"|Performance
!style="background:silver; color:black" align="left"|Performance
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|style="background:LightGrey; color:black"|Gas flows
|style="background:LightGrey; color:black"|Gas flows
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*N<math>_2</math>:? sccm
*N<sub>2</sub>:? sccm
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!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Substrates
!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Substrates
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