Specific Process Knowledge/Thin film deposition/ALD2 (PEALD): Difference between revisions
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'''The user manual, the user APV and contact information can be found in LabManager:''' | '''The user manual, the user APV and contact information can be found in LabManager:''' | ||
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=365 ALD 2 (PEALD) info page in LabManager] | |||
== Process information == | == Process information == | ||