Specific Process Knowledge/Thin film deposition/ALD2 (PEALD): Difference between revisions
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== Process information == | == Process information == | ||
*[[/Standard recipes on the ALD2 tool|Standard recipes on the | *[[/Standard recipes on the ALD2 tool|Standard recipes on the ALD2 tool]] | ||
*[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/ALD_multilayers Advanced recipes involving fabrication of multilayers done on '''ALD1''']] | *[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/ALD_multilayers Advanced recipes involving fabrication of multilayers done on '''ALD1''']] | ||
*[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/Al2O3_deposition_using_ALD Al<sub>2</sub>O<sub>3</sub> deposition using '''ALD1'''] | *[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/Al2O3_deposition_using_ALD Al<sub>2</sub>O<sub>3</sub> deposition using '''ALD1'''] | ||