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| =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
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| '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_microscope click here]''' | | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_microscope click here]''' |
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| | ''This page is written by DTU Nanolab internal'' |
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| [[Category: Equipment|Characterization Optical mi]] | | [[Category: Equipment|Characterization Optical mi]] |
| [[Category: Characterization|Optical mi]] | | [[Category: Characterization|Optical mi]] |
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| {| border="1" cellspacing="0" cellpadding="3"
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| !
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| ! Zeiss Jenatech (strain)
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| ! Nikon SMZ 1500
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| ! Leica S8 APO
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| ! Leitz Medilux
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| ! Zeiss Axiotron 2
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| ! Zeiss Jenatech (particles measurements)
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| ! Noco IR microscope
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| ! Nikon SMZ 1000
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| ! Nikon ME 600
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| ! Nikon Eclipse L200
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| ! Nikon Eclipse L200 (2)
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| ! Nikon ECLIPSE L200N 3
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| ! Nikon ECLIPSE L200N 4
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| |-
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| |
| |[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|left]]
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| [[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|left]]
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| |[[image:Nikon SMZ 1500.jpg|100x100px|thumb|left]]
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| |[[image:Leica S8 APO.jpg|100x100px|thumb|left]]
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| |[[image:Leitz Medilux.jpg|100x100px|thumb|left]]
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| |[[image:Zeiss Axiotron.jpg|100x100px|thumb|left]]
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| [[image:Zeiss Axiotron_1.jpg|100x100px|thumb|left]]
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| |[[image:Zeiss Jenatech particle measurement_2.jpg|100x100px|thumb|left]]
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| [[image:Zeiss Jenatech particle measurement_1.jpg|100x100px|thumb|left]]
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| |[[image:Noco IR microscope.jpg|100x100px|thumb|left]]
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| [[image:Noco IR microscope_1.jpg|100x100px|thumb|left]]
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| |[[image:Nikon SMZ 1000.jpg|100x100px|thumb|left]]
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| ||[[image:Nikon ME 600.jpg|100x100px|thumb|left]]
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| [[image:Nikon ME 600_1.jpg|100x100px|thumb|left]]
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| |[[image:Nikon Eclipse L200.jpg|100x100px|thumb|left]]
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| [[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|left]]
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| |[[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|left]]
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| [[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|left]]
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| |[[File:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|left]]
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| |[[File:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|left]]
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| |-
| |
| |'''Location'''
| |
| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |Check LabManager
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| |-
| |
| |'''Special features'''
| |
| |Wollastron prism
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| |Stereoscopic microscope
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| |Stereoscopic microscope
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|
| |
| |No
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| |No
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| |No
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| |Infra red (IR) camera
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| |Stereoscopic microscope
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| |Wollastron prism
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| |Motorized stage
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|
| |
| [[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|auto scan guide]]
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| |No
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| |No
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| |No
| |
| |-
| |
| |'''Ocular magnification'''
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| |10x
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| |No
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| |No
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| |10x
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| |10x
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| |10x
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| |10x
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| |No
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| |10x
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| |10x
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| |10x
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| |10x
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| |10x
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| |-
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| |'''Objective magnification'''
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| |2.5x, 5x, 10x, 20x, 50x
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| |Zoom 100x
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| |Zoom 80x
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| |2.5x, 5x, 10x, 20x, 50x
| |
| |5x, 10x, 20x, 50x
| |
| |5x, 10x, 20x, 50x, 100x
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| |2.5x, 5x, 20x, 50x
| |
| |Zoom 100x
| |
| |5x, 10x, 20x, 50x, 100x
| |
| |2.5x, 5x, 10x, 20x, 50x, 100x
| |
| |2.5x, 5x, 10x, 20x, 50x, 100x
| |
| |2.5x, 5x, 10x, 20x, 50x, 100x
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| |2.5x, 5x, 10x, 20x, 50x, 100x
| |
| |-
| |
| |'''Bright field'''
| |
| |Yes
| |
| |No
| |
| |No
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |No
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |-
| |
| |'''Dark field'''
| |
| |Yes
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| |No
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| |No
| |
| |No
| |
| |Yes
| |
| |Yes
| |
| |No
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| |No
| |
| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
| |
| |-
| |
| |'''Polarizer'''
| |
| |Yes
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| |No
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| |No
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| |No
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| |No
| |
| |Yes
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| |No
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| |No
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| |Yes
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| |No
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| |No
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| |No
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| |No
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| |-
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| |'''Episcopic light (reflected light)'''
| |
| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |-
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| |'''Diascopic light (transmitted light)'''
| |
| |No
| |
| |Yes
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| |No
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| |Yes
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| |Yes
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| |No
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| |Yes
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| |No
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| |No
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |-
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| |'''View with eye'''
| |
| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |-
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| |'''View on screen (camera)'''
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| |Yes
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| |No
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| |No
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| |Yes
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| |Yes
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| |No
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| |Yes (IR)
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| |No
| |
| |Yes
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| |Yes
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| |Yes
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| |Yes
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| |Yes
| |
| |-
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| |'''Measurement option'''
| |
| |No
| |
| |No
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| |No
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| |No
| |
| |Yes
| |
| |No
| |
| |No
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| |No
| |
| |No
| |
| |Yes
| |
| |Yes
| |
| |Yes
| |
| |Yes
| |
| |-
| |
| |}
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|
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| It is possible to make an automated scanning of a full wafer on the Nikon Eclipse L200 with motorized stage '''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Nikon Eclipse L200 auto scan guide]]'''
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|
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| =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
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|
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| {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
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| |-
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| |-style="background:white; color:black; vertical-align:middle; text-align:center;"
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| !Microscope
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| !Location
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| !Responsible Group
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| !Objectives
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| !Ocular
| |
| !Special features
| |
| !Features
| |
| !Camera
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| !Analysis software
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
| |
| !Nikon SMZ 1000[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
| |
| |346-901
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| |Wet chemistry
| |
| |Zoom 0.8x - 8x
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| |10x
| |
| |Stereoscopic microscope
| |
| |Episcopic
| |
| |No
| |
| |No
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
| |
| !Noco IR[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]]
| |
| |346-901
| |
| |Wet chemistry
| |
| |
| |
| *2.5x
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| *10x
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| *20x
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| *50x
| |
| |10x
| |
| |IR imaging
| |
| |
| |
| *Polarizer
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| *Episcopic
| |
| *Diascopic
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| *Brightfield
| |
| |IR camera
| |
| |No
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
| |
| !Leica INM100[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
| |
| |346-901
| |
| |Wet chemistry
| |
| |
| |
| *2.5x
| |
| *5x
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| *10x
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| *20x
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| *50x
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| |10x
| |
| |
| |
| |
| |
| *Episcopic
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| *Diascopic
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| *Brightfield
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| *Darkfield
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| |DS-Fi2
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| |NIS-D
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
| |
| !Nikon Eclipse L200 #2[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]]
| |
| |C1
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| |Thin Film
| |
| |
| |
| *2.5x
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| *100x
| |
| |10x
| |
| |
| |
| |
| |
| *Episcopic
| |
| *Diascopic
| |
| *Brightfield
| |
| *Darkfield
| |
| |DS-Fi1
| |
| |NIS-D
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
| |
| !Zeiss Jenatech[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]]
| |
| |C1
| |
| |Thin Film
| |
| |
| |
| *5x
| |
| *10x
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| *20x
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| *50x
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| *100x
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| |10x
| |
| |
| |
| |
| |
| *Polarizer
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| *Episcopic
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| *Diascopic
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| *Brightfield
| |
| |No
| |
| |No
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
| |
| !Nikon Eclipse L200 #1[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]]
| |
| |D3
| |
| |Thin Film
| |
| |
| |
| *2.5x
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| *100x
| |
| |10x
| |
| |
| |
| *Motorized stage
| |
| *'''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Auto scan guide]]'''
| |
| |
| |
| *Episcopic
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| *Diascopic
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| *Brightfield
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| *Darkfield
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| |DS-Fi1
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| |NIS-BR
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
| |
| !Leitz Medilux[[image:Leitz Medilux.jpg|100x100px|thumb|center]]
| |
| |D3
| |
| |Thin Film
| |
| |
| |
| *2.5x
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| |10x
| |
| |
| |
| |
| |
| *Episcopic
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| *Diascopic
| |
| *Brightfield
| |
| |DX40-274FW
| |
| |Kappa Control Center
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
| |
| !Nikon Eclipse L200N #3[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]]
| |
| |E4
| |
| |Lithography
| |
| |
| |
| *2.5x
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| *100x
| |
| |10x
| |
| |
| |
| |
| |
| *Polarizer
| |
| *Episcopic
| |
| *Diascopic
| |
| *Brightfield
| |
| *Darkfield
| |
| |
| |
| *DS-Fi2
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| *C-mount, 0.7x relay
| |
| |NIS-D
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
| |
| !Nikon Eclipse L200N #4[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]]
| |
| |E5
| |
| |Lithography
| |
| |
| |
| *2.5x
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| *100x
| |
| |10x
| |
| |
| |
| |
| |
| *Polarizer
| |
| *Episcopic
| |
| *Diascopic
| |
| *Brightfield
| |
| *Darkfield
| |
| |
| |
| *DS-Fi2
| |
| *C-mount, 0.7x relay
| |
| |NIS-D
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
| |
| !Nikon ME 600[[image:Nikon ME 600.jpg|100x100px|thumb|center]][[image:Nikon ME 600_1.jpg|100x100px|thumb|center]]
| |
| |F1
| |
| |Thin Film
| |
| |
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| *100x
| |
| |10x
| |
| |
| |
| |
| |
| *Polarizer
| |
| *Episcopic
| |
| *Brightfield
| |
| *Darkfield
| |
| |DS-Fi2
| |
| |NIS-D
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
| |
| !Leica S8 APO[[image:Leica S8 APO.jpg|100x100px|thumb|center]]
| |
| |F2
| |
| |Thin Film
| |
| |Zoom 1x - 8x
| |
| |10x
| |
| |Stereoscopic microscope
| |
| |Episcopic
| |
| |No
| |
| |No
| |
| |-
| |
|
| |
| |-
| |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
| |
| !Zeiss Axiotron[[image:Zeiss Axiotron.jpg|100x100px|thumb|center]][[image:Zeiss Axiotron_1.jpg|100x100px|thumb|center]]
| |
| |F3
| |
| |Lithography
| |
| |
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| |10x
| |
| |
| |
| |
| |
| *Episcopic
| |
| *Diascopic
| |
| *Brightfield
| |
| *Darkfield
| |
| |Infinity X
| |
| |DeltaPix
| |
| |-
| |
|
| |
| |}
| |
|
| |
| <br clear="all" />
| |
|
| |
| =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
| |
|
| |
|
| {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" | | {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" |
Line 516: |
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| !Noco IR | | !Noco IR |
| !Leica INM 100 | | !Leica INM 100 |
| !Nikon Eclipse L200 #2
| |
| !Zeiss Jenatech | | !Zeiss Jenatech |
| !Nikon Eclipse L200 #1 | | !Nikon Eclipse L200 #1 |
| !Leitz Medilux | | !Nikon Eclipse L200 #2 |
| !Nikon Eclipse L200N #3 | | !Nikon Eclipse L200N #3 |
| !Nikon Eclipse L200N #4 | | !Nikon Eclipse L200N #4 |
Line 532: |
Line 28: |
| |[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]] | | |[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]] |
| |[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]] | | |[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]] |
| |[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]] | | |[[image:LeicaINM100.jpg|100x100px|thumb|center]] |
| |[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]]
| |
| |[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]] | | |[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]] |
| |[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]] | | |[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]] |
| |[[image:Leitz Medilux.jpg|100x100px|thumb|center]] | | |[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]] |
| |[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]] | | |[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]] |
| |[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]] | | |[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]] |
Line 550: |
Line 45: |
| |346-901 | | |346-901 |
| |346-901 | | |346-901 |
| |C1 | | |cleanroom A1 |
| |C1
| | |cleanroom D3 |
| |D3 | | |cleanroom F3 |
| |D3 | | |cleanroom E4 |
| |E4 | | |cleanroom E5 |
| |E5 | | |cleanroom F1 |
| |F1 | | |cleanroom Cx1 |
| |F2 | | |cleanroom D3 |
| |F3 | |
| |- | | |- |
|
| |
|
Line 567: |
Line 61: |
| |Wet chemistry | | |Wet chemistry |
| |Wet chemistry | | |Wet chemistry |
| |Thin Film
| |
| |Thin Film
| |
| |Thin Film
| |
| |Thin Film
| |
| |Lithography | | |Lithography |
| |Lithography | | |Lithography |
| |Thin Film | | |Lithography |
| |Thin Film | | |Lithography |
| | |Lithography |
| | |Lithography |
| | |Lithography |
| |Lithography | | |Lithography |
| |- | | |- |
Line 594: |
Line 87: |
| *50x | | *50x |
| | | | | |
| *2.5x
| |
| *5x | | *5x |
| *10x | | *10x |
Line 601: |
Line 93: |
| *100x | | *100x |
| | | | | |
| | *2.5x |
| *5x | | *5x |
| *10x | | *10x |
| *20x | | *20x |
| *50x | | *50x |
| *100x
| |
| | | | | |
| *2.5x | | *2.5x |
Line 613: |
Line 105: |
| *50x | | *50x |
| *100x | | *100x |
| |
| |
| *2.5x
| |
| *5x
| |
| *10x
| |
| *20x
| |
| *50x
| |
| | | | | |
| *2.5x | | *2.5x |
Line 650: |
Line 136: |
| |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;" | | |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;" |
| !Ocular | | !Ocular |
| |10x
| |
| |10x | | |10x |
| |10x | | |10x |
Line 669: |
Line 154: |
| |Stereoscopic microscope | | |Stereoscopic microscope |
| |IR imaging | | |IR imaging |
| |
| |
| | | | | |
| | | | | |
Line 691: |
Line 175: |
| *Polarizer | | *Polarizer |
| *Brightfield | | *Brightfield |
| |
| |
| *Brightfield
| |
| *Darkfield
| |
| | | | | |
| *Brightfield | | *Brightfield |
Line 705: |
Line 186: |
| | | | | |
| *Brightfield | | *Brightfield |
| | *Darkfield |
| | | | | |
| *Polarizer | | *Polarizer |
Line 729: |
Line 211: |
| | | | | |
| *Episcopic | | *Episcopic |
| |
| |
| *Episcopic
| |
| *Diascopic
| |
| | | | | |
| *Episcopic | | *Episcopic |
Line 768: |
Line 247: |
| |IR camera | | |IR camera |
| |DS-Fi2 | | |DS-Fi2 |
| | |None |
| |DS-Fi1 | | |DS-Fi1 |
| |None
| |
| |DS-Fi1 | | |DS-Fi1 |
| |DX40-274FW
| |
| | | | | |
| *DS-Fi2 | | *DS-Fi2 |
Line 788: |
Line 266: |
| |None | | |None |
| |None | | |None |
| |NIS-D
| |
| |NIS-D | | |NIS-D |
| |None | | |None |
| |NIS-BR | | |NIS-BR |
| |Kappa Control Center | | |NIS-D |
| |NIS-D | | |NIS-D |
| |NIS-D | | |NIS-D |
Line 803: |
Line 280: |
|
| |
|
| <br clear="all" /> | | <br clear="all" /> |
| | |
| | There are also two optical microscopes in building 451, a stereo microscope and a transmission microscope, that were both previously located in Packlab. Please ask staff / the BioMic group for details. |