Jump to content

LabAdviser/Courses: Difference between revisions

From LabAdviser
← Older edit
VisualWikitext
Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,301 edits
Mmat (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers, Administrators
1,954 edits
 
(430 intermediate revisions by 18 users not shown)
Line 1: Line 1:
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/LabAdviser/Courses click here]'''
{{cc-nanolab}}


'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses click here]'''


=Courses=


We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.


==The Cleanroom Introduction Course==
= Tool Package Training (TPT) =
For information regarding the Introduction Course, please take a look at the DTU Danchip homepage, a direct link is given here: [http://www.danchip.dtu.dk/english/user-information/courses/introduction-course]
For selected equipment groups, we have created online introductory courses called Tool Package Training (TPT) that provide a comprehensive overview of both the theoretical principles behind the processes and the equipment used. These courses also include video demonstrations showcasing the operation of the equipment available in our cleanroom facilities. The completion of the respective TPTs are mandatory for all academic users before hands-on training on specific equipment can be requested. While we strongly recommend commercial users to take the online courses as well, only the video demonstrations showcasing the operation of the equipment are mandatory.
 
==The Lithography TPT==
 
DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.  
 
The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
 
 
 
{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
|-
 
|-
|-style="background:White; color:black; text-align:center"
!colspan="2"|Lithography Tool Package Training
|-
 
|-
!Schedule
|
<!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
'''Theoretical part'''
* The lecture has been replaced by videos that can be viewed at one's leisure.
* A 1 hour "questions and exercises" session once or twice a month will be planned as needed (typically Fridays 09:30-10:30).
* NEXT "questions and exercises" sessions: '''31st of March, 21st of April, 28th of April, 19th of May'''
'''Practical part'''
* A 4-5 hour training session 2-3 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 14:00).
* NEXT training sessions: '''5th of April, 26th of April, 3rd of May, 24th of May'''
|-
 
|-
!Location
|
'''Theoretical part'''
* The location of the "questions and exercises" session will be specified after signing up for the course.
'''Practical part'''
* The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
|-


{| border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
! style="background:Black; color:white" width="3%" align="center" |Course
! style="background:Black; color:white" width="5%" align="center" |Requirement
! style="background:Black; color:white" width="10%" align="center" |Description
|-
|-
!Qualified Prerequisites
|- style="background:LightGrey; color:black" valign="center"
|
!Lithography TPT
* Cleanroom safety course at DTU Danchip
|for working with [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Lithography Lithography Equipment]
* Admission to the cleanroom must be obtained before the training session
|This online course presents the theory on lithographic processes and equipment, as well as training in equipment operation in the cleanroom. The course is a prerequisite for hands-on training on all lithography equipment. Find more information on the [https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography#Lithography_Tool_Package_Training Lithography TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/lithography-tool-training here].
|-
|-
 
|- style="background:WhiteSmoke; color:black" valign="center"
!Thin Film TPT
|for getting access to [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition Thin Film Deposition] & [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thermal_Process Thermal Growth Equipment]
|This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_Thin_Film Thin Film TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/thin-film-training here].
|-
|-
!Preparations
|- style="background:LightGrey; color:black" valign="center"
|
!Dry Etch TPT
'''Before the "questions and exercises" session'''
|for getting access to [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Etch Dry Etch Equipment]
* Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus)
|This online course presents the theory on dry etching and equipment, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the dry etching equipment in the cleanroom. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_Dry_Etch Dry Etch TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here]
* Watch the [http://podcast.llab.dtu.dk/index.php?id=302 lecture videos] (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos.
'''Before training session'''
* Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic).
* Study the equipment manuals. The manuals are available in LabManager.
* Study the TPT process flows (first print, and alignment).
'''Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below.
|-
|-
 
|- style="background:WhiteSmoke; color:black" valign="center"
!SEM TPT
|for getting access to SEMs in [https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy 346] and [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/314/Microscopy_314-307 314/307]
|This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the SEMs in building 314/307, and 346/347 at DTU Nanolab. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here].
|-
|-
!Course Responsible
|
The Lithography Group at DTU Danchip.
Sign up for the course by e-mailing to [mailto:lithography@danchip.dtu.dk lithography@danchip.dtu.dk].
|-
|-
!Learning Objectives
|
* Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
* Authorization to use spin coater, mask aligner, and developer at DTU Danchip
* Calculate relevant process parameters
* Analyze and apply your results of lithographic processing
|-
|}
<br clear="all" />
===Material for preparations and further information===
{| style="color: black;" width="90%"
| colspan="3" |
|-
| style="width: 20%"|
'''<big>Literature</big>'''
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf  Franssila, 2010, Chapter 9: Optical Lithography]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography]
*[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals]
*[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals]
'''<big>Lecture videos</big>'''
*[http://podcast.llab.dtu.dk/index.php?id=302 Lecture videos] (7 videos, 2:41 hours in total)
'''<big>Slides from Lecture</big>'''
*[[:Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]]
*[[:Media:Litho_Tool_Package_-_Spin_coating.pdf‎|TPT slides: Spin Coating]]
*[[:Media:Litho_Tool_Package_-_Exposure.pdf|TPT slides: UV Exposure]]
*[[:Media:Litho_Tool_Package_-_Development.pdf‎|TPT slides: Development]]
*[[:Media:Litho_Tool_Package_-_Post_processing.pdf‎|TPT slides: Post-processing]]
*[[:Media:Litho_Tool_Package_-_Process_effects_and_examples.pdf|TPT slides: Process Effects and Examples]]
| style="width: 20%"|
'''<big>Training videos</big>'''
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]
<!--*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.057_Manual_Spin_Coater_V2-720p.mp4 Training Video: Manual Spin Coater] -->
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Training Video: UV Mask Aligner Part I (Operation)]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part2_aligning-720p.mp4 Training Video: UV Mask Aligner Part II (Alignment)]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.050_Developer_TMAH_UV-Lithography-720p.mp4 Training Video: Automatic Puddle Developer]
<!--*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer] -->
'''<big>Manuals</big>'''
*Automatic Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 Spin Coater: Gamma UV]
<!--*Manual Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 Spin Coater: Manual Standard Resists] -->
*UV Mask Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=339 Aligner: MA6 - 2] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=44 KS Aligner]
*Automatic Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=329 Developer: TMAH UV-lithography]
<!--*Manual Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 Developer: TMAH Manual] -->
'''<big>Process Flows</big>'''
*[[:Media:Process_Flow_TPT first print.pdf|TPT first print process flow]]
*[[:Media:Process_Flow_TPT alignment.pdf|TPT alignment process flow]]
| style="width: 20%"|
|}
|}
<br>
<br clear="all">


<br clear="all" />
= Equipment Tutorials =
 
For selected equipment, we have created online courses called exxplaining the operation (hardware and software) of our equipment. These tutorials are mandatory for all users before hands-on training on specific equipment can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].  
==The Dry Etch TPT [[image:Under_construction.png|70px]] ==
 
DTU Danchip offers a Tool Package Training in Dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.  
 
The course is for all users that intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.
 
 
{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
|-
 
|-
|-style="background:White; color:black; text-align:center"
!colspan="2"|Dry Etch Tool Package Training
|-
 
|-
!Schedule
|
'''Theoretical part'''
* The next 3 hour lecture is on the '''28th of Marts''' from 9:00 to approximately 12.


'''Practical part'''
{| border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
* A 2-3 hour training session, max. 3 persons per session will be planed after the lecture
! style="background:Black; color:white" width="3%" align="center" |Course
|-
! style="background:Black; color:white" width="5%" align="center" |Requirement
 
! style="background:Black; color:white" width="10%" align="center" |Description
|-
!Location
|
'''Theoretical part'''
* The location of the lecture will be notified after you have signed up
'''Practical part'''
* The training session takes place inside the cleanroom. The meeting point will be in The gauning area
|-
|-
 
|- style="background:LightGrey; color:black" valign="center"
!E-beam Lithography
|for getting access to [[Specific Process Knowledge/Lithography/EBeamLithography | E-beam Lithography Tools]]
|This online tutorial will be part of the E-beam TPT and is currently under prepration. <!-- ADDED WHEN TPT IS READY: It will include theory on electron beam lithography and equipment, as well as training in preparation of  exposure files and equipment operation.!--> The course is a prerequisite for hands-on training on the electron beam tool. Find more information about the training in the [[LabAdviser/Courses/TPT Ebeam|TPT E-beam]].
|-
|-
!Qualified Prerequisites
|- style="background:WhiteSmoke; color:black" valign="center"
|
!Ellipsometer VASE
* Cleanroom safety course at DTU Danchip
|for getting access to the [[Specific Process Knowledge/Characterization/Optical characterization#Ellipsometer VASE and Ellipsometer M-2000V|Ellipsometers]]
* Admission to the cleanroom must be obtained before the training session
|This online course consists of two short online tutorials
* [https://www.jawoollam.com/resources/ellipsometry-tutorial/what-is-ellipsometry  Tutorial ''by Woollam'']
* [https://www.youtube.com/watch?v=EC-oyRhKr0A|Ellipsometer Ellipsometer operation ''by DTU Nanolab'']
|-
|-
 
|- style="background:LightGrey; color:black" valign="center"
! Atomic Force Microscopy
| for getting access to the [[Specific Process Knowledge/Characterization/AFM:_Atomic_Force_Microscopy | AFM equipment]]
|This online course consists of three short training videos regarding equipment operation. 
* [https://www.youtube.com/watch?v=i6JXopjBiy4&list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj AFM Icon-PT Operation]
|-
|-
!Preparations
|- style="background:WhiteSmoke; color:black" valign="center"
|
! Temescal E-beam evaporator
'''Before the lecture'''
| for getting access to the E-beam Evaporators [[Specific Process Knowledge/Thin film deposition/Temescal | (Temescal)]] or [[Specific Process Knowledge/Thin film deposition/10-pocket e-beam evaporator | (10-Pockets)]]
*Watch the video:[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Introduction_to_Dry_Etch_Equipment-1080p.mp4 Introduction to Dry Etch Equipment]
|This online course consists of four short training videos regarding equipment operation.
'''Before training session'''
* [https://www.youtube.com/playlist?list=PLjWVU97LayHCQWuQyHwddJnpsEYfQp0wf Temescal Operation]
* Watch the training video: of spin coating (automatic), exposure (operation, and alignment), and development (automatic).
* Watch the screen cast video's for the ASE/AOE software:See below
* Watch the screen cast video's for the DRIE/ICP meat and III-V ICP:  See below
|-
|-
 
|- style="background:LightGrey; color:black" valign="center"
! Lesker Dual Chamber Sputter System
| for getting access to the [[Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system | Sputter-System Metal-Oxide(PC1) Metal-Nitride (PC3)]]
|This online course consists of three short training videos regarding equipment operation for PC1 (Oxide) and PC3 (Nitride)). 
* [https://www.youtube.com/watch?v=1WHv36coRUc PC1 (Oxide) and PC3 (Nitride) Operation]
|-
|-
!Course Responsible
|
The Dry Etch Group at DTU Danchip.
Sign up for the course by e-mailing to [mailto:dryetch@danchip.dtu.dk dryetch@danchip.dtu.dk].
|-
|-
|- style="background:WhiteSmoke; color:black" valign="center"
! XPS
| for getting access to the [[Specific Process Knowledge/Characterization/XPS | XPS]]
|If you already a user at DTU Nanolab and have access to LabManager, please fill the access request form following the link below:
*[http://labmanager.dtu.dk/function.php?module=Request&view=edit&rt=2 Access request form for XPS training]
Else, please contact the Fabrication Support group.


This online course presents the theory behind XPS analysis, as well as training in equipment operation in the cleanroom.
* "Theory behind XPS" by ''Technical University of Munich'' (pages 1-16): [[File:Electron Spectroscopy of surfaces.pdf]]
* Youtube video by ''Kent L. Rhodes (McCrone Group)'' hosted by ''Hooke College of Applied Sciences'': [https://www.youtube.com/watch?v=nGQxmOcs2rg "Using XPS for Industrial Problem Solving"]
* Equipment operation by DTU Nanolab:
: [https://www.youtube.com/playlist?list=PLjWVU97LayHBtOkPCSv8QA-sD4Dbz1jrb XPS Operation]
|-
|-
!Learning Objectives
|
*Know why and when to use dry etching
*Use the dry etchers without harming the machines
*Select the right instrument to use for his/her dry etch processing
*Select an appropriate etch recipe for his/her dry etch processing
*Spot when the recipe needs to be tuned for his/her needs and
*Suggest relevant tuning parameters
|-
|}
|}
 
<!--also available
<br clear="all" />
Oxidation Furnace:
 
https://www.youtube.com/watch?v=Hi-1zN1RVqc
===Material for preparations and further information===
RCA:  
{| style="color: black;" width="90%"
https://www.youtube.com/watch?v=U81QbZsCX9U&list=PLjWVU97LayHDW8Q1Lxk7RzgAp7nNN0WFF&index=4
| colspan="3" |
!-->
|-
<br>
| style="width: 20%"|
<br clear="all">
'''<big>Literature</big>'''
 
 
 
'''<big>Pre Lecture video</big>'''
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Introduction_to_Dry_Etch_Equipment-1080p.mp4 Introduction to Dry Etch Equipment 5min37s]
 
 
'''<big>Slides from Lecture</big>'''
*[[:Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]]
*[[:Media:Litho_Tool_Package_-_Spin_coating.pdf‎|TPT slides: Spin Coating]]
*[[:Media:Litho_Tool_Package_-_Exposure.pdf|TPT slides: UV Exposure]]
*[[:Media:Litho_Tool_Package_-_Development.pdf‎|TPT slides: Development]]
*[[:Media:Litho_Tool_Package_-_Post_processing.pdf‎|TPT slides: Post-processing]]
*[[:Media:Litho_Tool_Package_-_Process_effects_and_examples.pdf|TPT slides: Process Effects and Examples]]
 
| style="width: 20%"|
 
'''<big>Pre hands-on training videos</big>'''<br>
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/TPThands-on_IntroAndWafer_extra-720p.mp4 TPT hands-on intro 6min6s]
Screen cast videos for the DRIE, ICP metal and III-V ICP:
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Overview_HiRes-720p.mp4 Overview 3min25s]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=19b8e1bfcd514c0e01eee7df416a0449&cHash=94480d4d38ce36a2a7621cdfab1054b2 Running processes]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=ac1c07ec933f7f138ec1788569cd568e&cHash=e73d3b0cc4fd5f8763c0c42d96bc7adc Recipes]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=ef3a91e929cce443fb2388bae35acf41&cHash=7d104e10f1da36ec01097059d6ee441b The Bosch Processes]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Automatic_Processing_DRIE-720p.mp4 Automatic processing at the DRIE-Pegasus 14min56s]
 
Screen cast videos for the ASE and AOE:
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=3c9e59310178de0c548d437712f077c2&cHash=e8c7fe4f4ff14672c970a94ec093cb8e Intro]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=3ec3324cdd5df30e38c4215e138c0f3b&cHash=fee573a639b0f5b6cfd1cd058b8376ec Load and Transfer]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=5dc5bdbcc2842364c6bcb23735cd42e0&cHash=f046044c1603f61fd6af4e0b0264955b Recipe Editor]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=372bc3286dcee3303214c268e14e5663&cHash=ae70bb52ca1c611c9fc7602bcd613ec5 The Bosch Process]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=b4deb2d0030f3141f41a4497375bf861&cHash=a75fab158fec382198b74336cba7bdc4 Run a Process]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=b995b7088690f218f73c24a6bd6361ad&cHash=c6076806edcff2f12036b4e41cbee14d Removing a Wafer from the Load Lock]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=742052c10f9e77778ffab73561b9e840&cHash=44832011bb363b1162900338c834c785 The Process Log]
 
 
 
| style="width: 20%"|
 
|}
 
<br clear="all" />
 
==The SEM TPT [[image:Under_construction.png|70px]] ==

Latest revision as of 15:45, 17 June 2025

The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.

Feedback to this page: click here


Tool Package Training (TPT)

For selected equipment groups, we have created online introductory courses called Tool Package Training (TPT) that provide a comprehensive overview of both the theoretical principles behind the processes and the equipment used. These courses also include video demonstrations showcasing the operation of the equipment available in our cleanroom facilities. The completion of the respective TPTs are mandatory for all academic users before hands-on training on specific equipment can be requested. While we strongly recommend commercial users to take the online courses as well, only the video demonstrations showcasing the operation of the equipment are mandatory.

Course Requirement Description
Lithography TPT for working with Lithography Equipment This online course presents the theory on lithographic processes and equipment, as well as training in equipment operation in the cleanroom. The course is a prerequisite for hands-on training on all lithography equipment. Find more information on the Lithography TPT and sign up here.
Thin Film TPT for getting access to Thin Film Deposition & Thermal Growth Equipment This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the Thin Film TPT and sign up here.
Dry Etch TPT for getting access to Dry Etch Equipment This online course presents the theory on dry etching and equipment, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the dry etching equipment in the cleanroom. Find more information on the Dry Etch TPT and sign up here
SEM TPT for getting access to SEMs in 346 and 314/307 This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the SEMs in building 314/307, and 346/347 at DTU Nanolab. Find more information on the SEM TPT and sign up here.



Equipment Tutorials

For selected equipment, we have created online courses called exxplaining the operation (hardware and software) of our equipment. These tutorials are mandatory for all users before hands-on training on specific equipment can be requested via training@nanolab.dtu.dk.

Course Requirement Description
E-beam Lithography for getting access to E-beam Lithography Tools This online tutorial will be part of the E-beam TPT and is currently under prepration. The course is a prerequisite for hands-on training on the electron beam tool. Find more information about the training in the TPT E-beam.
Ellipsometer VASE for getting access to the Ellipsometers This online course consists of two short online tutorials
Atomic Force Microscopy for getting access to the AFM equipment This online course consists of three short training videos regarding equipment operation.
Temescal E-beam evaporator for getting access to the E-beam Evaporators (Temescal) or (10-Pockets) This online course consists of four short training videos regarding equipment operation.
Lesker Dual Chamber Sputter System for getting access to the Sputter-System Metal-Oxide(PC1) Metal-Nitride (PC3) This online course consists of three short training videos regarding equipment operation for PC1 (Oxide) and PC3 (Nitride)).
XPS for getting access to the XPS If you already a user at DTU Nanolab and have access to LabManager, please fill the access request form following the link below:

Else, please contact the Fabrication Support group.

This online course presents the theory behind XPS analysis, as well as training in equipment operation in the cleanroom.

XPS Operation



Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=LabAdviser/Courses&oldid=53108"