LabAdviser/Courses

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Introductory Courses to DTU Nanolab Facilities

We have made a number of courses to prepare our users for their work in our cleanroom facility and available equipment, as well as training for our other facilities. Below you find a list of available courses. The Safety Introduction Course is mandatory for all users that need to use our cleanroom facilities on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you want to use.

Course	Mandatory ...	Short Course Decription
Safety Introduction Course	for working inside the cleanroom	Theoretical and practical safety training. All new cleanroom users must obtain DTU Nanolab’s introduction course certificate before access to the cleanroom is granted. Find more information and sign up here.
Safety Introduction Course for "Other Facilities"	for working in other Nanolab facilities	DTU Nanolab offers a range of open access laboratories dedicated to both fabrication and characterization purposes. These facilities are situated in buildings 314/307, 346, and 347. Find more information and sign up here.
Lithography TPT	for working with Lithography Equipment	This online course presents the theory on lithographic processes and equipment, as well as training in equipment operation in the cleanroom. The course is a prerequisite for hands-on training on all lithography equipment. Find more information on the Lithography TPT and sign up here.
SEM TPT	for getting access to SEMs in 346 and 314/307	This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. It is also irregularly held as in-person lecture at DTU Nanolab. The course is a prerequisite for hands-on training on any of the SEMs in building 314/307, and 346 at DTU Nanolab. Find more information on the SEM TPT and sign up here.
Dry Etch TPT	for getting access to Dry Etch Equipment	This online course presents the theory on dry etching and equipment, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the dry etching equipment in the cleanroom. Find more information on the Dry Etch TPT and sign up here
Thin Film TPT	for getting access to Thin Film Deposition & Thermal Growth Equipment	This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the Thin Film TPT and sign up here.

Master and Ph.D courses

There are a number of master and Ph.D courses available at or in cooperation with DTU Nanolab and its facilities.

Course	Course Type	Course Decription
M.Sc. course: 10851 - Introduction to Cleanroom-based Microfabrication	for master students	The overall aim of the course is to provide you with theoretical background and hands-on experience in the most common experimental techniques used for Silicon microfabrication. You will be introduced to microfabrication methods such as photolithography, etching, thin film deposition and characterization techniques such as scanning electron microscopy (SEM) and profilometry. During the course students will fabricate a working pressure sensor and characterize it in the DTU Nanolab cleanroom. This will enable you to design a fabrication process, draw a lithographic mask and work safely in the DTU Nanolab cleanroom. The TPT courses are a main part of the course. The course gives you 5 ECTS points. Find more information and sign up here.
M.Sc. course: 10855 - Advanced fabrication of micro- and nanostructures	for master students	In this course, you will learn how to fabricate micro- and nanostructures, and microdevices in DTUs cleanroom. You will be introduced to the most advanced processes and tools in the cleanroom, and you will receive training in operating some of these tools yourself. You will learn how to engineer a specific micro/nanostructure or microdevice from a starting point defined by its desired functionality, and you will learn systematic methods for how to convert this information to appropriate choices of fabrication tools, process sequences, and characterisation steps. The course gives you 5 ECTS points. Prerequisites: 22600/10851/10852 or equivalent courses in introduction to cleanroom based microfabrication. Find more information and sign up here.
M.Sc. course: 10862 - Polymer micro fabrication	for master students	The goal of this course is to provide you with hands-on experience in the experimental techniques used for polymer microfabrication and characterization, as well as to give you sufficient background to choose the most suitable techniques for a given application. You will be introduced to fast prototyping techniques such as laser ablation and 3D printing, and to mass fabrication methods such as injection molding. You will analyze a real-world microsystems problem and propose a polymer prototype solution of your own design. The course gives you 5 ECTS points. Find more information and sign up here.
M.Sc. course: 27510 - Biosensors and bioanalysis	for master students	The course aims at providing you with training and insights into the multidisciplinary field of biosensors, both in terms of assay design and format, state of the art micro/nanofabrication, and statistical analysis of obtained biosensor data. During the course you will acquire basic understanding of the physical/chemical/biological sensing phenomena that are the basis for modern biosensors with applications within fundamental research, environmental control, biotechnology and medical industry. The course gives you 5 ECTS points. Find more information and sign up here.
Ph.d. course: 56868 (10868) - Methods in Micro and Nanofabrication	for ph.d. students at Nanolab	This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points. Find more information and sign up here.

Links to training videos

DTU Nanolab has a YouTube channel where we have gathered all our training videos: [1]

We have a number of playlists and some single videos for equipment. You can get an overview here with links to the playlists/videos on You Tube

Safety and behavior

• Nanolab introduction course: Safety in the Cleanroom [2]
• Cleanroom safety at DTU Nanolab [3]
• Working with chemicals in the cleanroom at DTU Nanolab [4]
• Behaviour in the cleanroom at DTU Nanolab [5]
• Playlist: Craftsmen in the cleanroom/håndværkere i renrummet. [6]

Labmanager and Labadviser

• Playlist: DTU Nanolab systems (Labmanager and Labadviser)[7]

Wet chemistry

• Training in fume hoods part 1 - Intro and Getting Started [8]
• Training in fume hoods part 2 - Working With Acids, Bases and Solvents [9]
• Training in fume hoods part 3 – Wet benches and errors [10]
• Using Quick Dump Rinse Baths [11]
• Native Silicon Dioxide Removal [12]

Lithography

• Playlist: Lithography TPT - lecture videos [13]
• Playlist: Lithography TPT - tool training (Spin Coater, Mask Aligner MA6-2, Automatic Puddle Developer) [14]
• Playlist: Lithography TPT - tool training (Maskless Aligner) [15]

• E-beam lithography at DTU Nanolab [16]
• JEOL 9500 EBL [17]

• Manual Spin Coater: Labspin [18]
• Manual Puddle Developer [19]

Thin Film deposition and oxidation

• Playlist: E-beam evaporator (Temescal) [20]
• Lesker dual chamber sputter system at DTU Nanolab [21]
• Antistiction treatment [22]
• Furnace training: Oxidation furnace [23]

Dry Etch

• Playlist: Dry Etch TPT - Lecture videos [24]
• Playlist: Dry Etch TPT - hands-on videos [25]

Characterization

• Playlist: SEM Training videos for Zeiss Supra SEMs in building 346 [26]
• Playlist: AFM Icon Nanoscope software training part I/II/III [27]
• Ellipsometer training [28]
• Playlist: XPS [29]

Backend tools

• Disco Dicing saw - blade exchange [30]