Specific Process Knowledge/Characterization/XPS/ISS/Notes: Difference between revisions
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= Notes on ISS = | = Notes on ISS = | ||
This page only has temporary notes | This page only has temporary notes | ||
Latest revision as of 11:48, 28 June 2023
Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab
Notes on ISS
This page only has temporary notes
Calibration by Nanolab staff only
Open the ion gun dialog and select the 'Filament' tab as shown below. In the 'Auto Setup' frame select 'ISS mode' and press 'Run' as indicated by a green square below left.
When this procedure completes, press 'Calculate' in the 'Ion Source Energy' frame - highlighted by a red square.
