Specific Process Knowledge/Characterization/Profiler/Apex software: Difference between revisions

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==Apex software outside the cleanroom==
''All text by '''reet, DTU Nanolab'''''


The Tencor-KLA P17 stylus profiler comes with advanced data analysis software called APEX. We have an extra license for the software installed on a computer called NTCH-D0186 at Nanolab. The computer is currently located in the basement of building 346 in room 904. You will find it at the back of the room between the ALD and the PowderXRD.
=Apex software for data analysis=
<!-- You can log on to this computer through remote desktop


===How to access the software ===
The Tencor-KLA P17 stylus profiler comes with advanced data analysis software called APEX. We have an extra license for the software on a computer in the basement of building 346. The computer is located at the back of room 904 between the XRD Powder and the AFM. At the moment remote access is not possible, but you are able to access your files on the M-drive from the computer. Let us know if you would like us to find a solution for remote access and/or would like us to move the analysis computer to a room with daylight, as we are not sure how many of you would actually like to use the software.
*Connect to DTU's network by VPN unless you are physically at DTU.  
To use Apex, your data must be in a format that Apex can open. For line profiles that means you have to open the data in the Profiler Software first, which can only be done on the P17 computer in the cleanroom. With the data open or selected, press the Apex button and save it in Apex in a native format. It is also possible to check a box in the scan recipe that makes it possible to open the data in Apex automatically (see the Profiler Help document for more details or ask staff). Finally some data formats (e.g., 3D maps and 3D stress data) can always be opened in Apex.  


For this you can use the service Cisco AnyConnect Secure Mobility Client. Connect to AIT Extra-VPN with your usual credentials.
==How to use the software ==


[[image:pick-points-drawing.png|500x500px|right|thumb|How to choose to show only the measured line scans rather than the interpolated surface that APEX likes to calculate (see orange arrow). Screenshot by reet, DTU Nanolab, from Apex.]]


*Make a remote desktop connection to the computer NTCH-D0186.  
There are a number of tutorials and a thorough help document which you will find when you open the program. There is also a small introduction as an appendix to the [https://labmanager.dtu.dk/view_binary.php?fileId=4699 P17 help document] ''(requires login)''.


For this you can use the Remote Desktop Connection app (at least on Windows). Again log on with your own credentials.
Apex offers many formats for saving the data in nice reports and various options for exporting data.
-->
On the NTCH-D0186 desktop, you will find a shortcut to the APEX software.
Access your data on the M drive, O drive or through files.dtu.dk and open it up with the software.


===How to use the software ===
If Apex has automatically generated a surface from your line profiles of data, it is possible to view the underlying profiles by right-clicking on the surface and choosing Points Drawing instead of Lines Drawing or finding the same option (Points drawing) in the top ribbon. See figure on the right.
There are a number of tutorials on how to use APEX and a thorough help document which you will find when you open the program.  
If you learn something cool that you'd like to share, please let us know.


 
Best of luck and please contact [mailto:characterization@nanolab.dtu.dk characterization@nanolab.dtu.dk] if you have any questions or helpful tips.
If APEX has automatically generated a surface from your line profiles of data, it is sometimes possible to view the underlying profiles by right-clicking on the surface and choosing Show Point style instead of Line style.
 
 
There are many ways and formats for saving data in this program - notice whether the format you have chosen will be useful for your later needs.
 
Best of luck and please contact [mailto:thinfilm@dtu.dk thinfilm@dtu.dk] if you have any questions.

Latest revision as of 11:00, 24 May 2023

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All text by reet, DTU Nanolab

Apex software for data analysis

The Tencor-KLA P17 stylus profiler comes with advanced data analysis software called APEX. We have an extra license for the software on a computer in the basement of building 346. The computer is located at the back of room 904 between the XRD Powder and the AFM. At the moment remote access is not possible, but you are able to access your files on the M-drive from the computer. Let us know if you would like us to find a solution for remote access and/or would like us to move the analysis computer to a room with daylight, as we are not sure how many of you would actually like to use the software.

To use Apex, your data must be in a format that Apex can open. For line profiles that means you have to open the data in the Profiler Software first, which can only be done on the P17 computer in the cleanroom. With the data open or selected, press the Apex button and save it in Apex in a native format. It is also possible to check a box in the scan recipe that makes it possible to open the data in Apex automatically (see the Profiler Help document for more details or ask staff). Finally some data formats (e.g., 3D maps and 3D stress data) can always be opened in Apex.

How to use the software

How to choose to show only the measured line scans rather than the interpolated surface that APEX likes to calculate (see orange arrow). Screenshot by reet, DTU Nanolab, from Apex.

There are a number of tutorials and a thorough help document which you will find when you open the program. There is also a small introduction as an appendix to the P17 help document (requires login).

Apex offers many formats for saving the data in nice reports and various options for exporting data.

If Apex has automatically generated a surface from your line profiles of data, it is possible to view the underlying profiles by right-clicking on the surface and choosing Points Drawing instead of Lines Drawing or finding the same option (Points drawing) in the top ribbon. See figure on the right.

Best of luck and please contact characterization@nanolab.dtu.dk if you have any questions or helpful tips.

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