Specific Process Knowledge/Thermal Process/Oxidation/Oxidation on III-V oxidation furnace (C2): Difference between revisions
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=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>= | =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>= | ||
<i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b></i> | |||
The furnace is being tested. | |||
=='''Flow440''' recipe== | =='''Flow440''' recipe== | ||
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'''Wet oxidation''': Time: variable | '''Wet oxidation''': Time: variable | ||
'''Open''' | '''Open''': Automatically opens after the oxidation time reaches | ||
'''Unload samples''' | '''Unload samples''' | ||
Latest revision as of 11:09, 11 May 2023
THIS PAGE IS UNDER CONSTRUCTION
Unless otherwise stated, this page is written by DTU Nanolab internal
The furnace is being tested.
Flow440 recipe
Standby: N2 purge at 3 SLM and Standby temperature at 440C
LM-LOCK: Check LabManager
Wet stabilize: N2 through bubbler at 1.5 SLM for 20 min and then wait for operator to open the furnace
Open
Load samples
Close
Wet oxidation: Time: variable
Open: Automatically opens after the oxidation time reaches
Unload samples