Specific Process Knowledge/Thermal Process/Oxidation/Oxidation on III-V oxidation furnace (C2): Difference between revisions

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=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>=
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>=


'''Flow440''' recipe
<i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b></i>


Standby:N2 purge at 3 SLM and Standby temperature at 440C
The furnace is being tested.


LM-LOCK: Check LabManager
=='''Flow440''' recipe==


Wet stabilize: N2 through bubbler at 1.5 SLM
'''Standby''': N2 purge at 3 SLM and Standby temperature at 440C
              Time: 20 min
              Wait for operator


Open
'''LM-LOCK''': Check LabManager
Load samples
Close


Wet oxidation
'''Wet stabilize''': N2 through bubbler at 1.5 SLM for 20 min and then wait for operator to open the furnace
Time: variable


Open
'''Open'''
Unload samples
 
'''Load samples'''
 
'''Close'''
 
'''Wet oxidation''': Time: variable
 
'''Open''': Automatically opens after the oxidation time reaches
 
'''Unload samples'''

Latest revision as of 11:09, 11 May 2023

THIS PAGE IS UNDER CONSTRUCTION

Unless otherwise stated, this page is written by DTU Nanolab internal

The furnace is being tested.

Flow440 recipe

Standby: N2 purge at 3 SLM and Standby temperature at 440C

LM-LOCK: Check LabManager

Wet stabilize: N2 through bubbler at 1.5 SLM for 20 min and then wait for operator to open the furnace

Open

Load samples

Close

Wet oxidation: Time: variable

Open: Automatically opens after the oxidation time reaches

Unload samples

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