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| '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Lithography click here]''' | | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Lithography click here]''' |
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| DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. | | DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment. After the TPT has been successfully completed, you can begin training on the lithography equipment at DTU Nanolab. |
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| The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
| | You are required to pass this course, in order to get access to using the lithography equipment inside the DTU Nanolab fabrication facility (The Cleanroom). |
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| !Schedule | | !Signing up for the course |
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| <!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
| | The course is in DTU Learn. You sign up for the course by enroling yourself in the course "DTU Nanolab TPT: Lithography". |
| '''Theoretical part'''
| | *Log into DTU Learn here: [https://learn.inside.dtu.dk DTU Learn] |
| * Lecture videos that can be viewed at one's leisure.
| | *Select the menu "Discover" |
| * A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30). | | *Search for "Nanolab" |
| * '''Sign up via [https://doodle.com/poll/metywuzqziwps6w3 Q&E session Doodle]'''
| | Select the course "DTU Nanolab TPT: Lithography" |
| '''Practical part'''
| | *Press "Enroll in Course" |
| * A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30).
| | *You have now signed up for the course. |
| * '''Sign up via [https://doodle.com/poll/yd2q9tbzm86by2ct Training session Doodle]'''
| | *Go to the course page in DTU Learn and choose "Course Content" and "Content" |
| * This part is not mandatory, and may be replaced by individual trainings if relevant. | | *Watch the lecture videos, read the learning material, and complete all the quizzes. |
| * <span style="color: red;">OBS: Due to a major maintenance project inside the cleanroom (replacing the fan filter units, cf. https://sites.dtu.dk/ffunanolab#2), these training sessions have been suspended, at least until the end of October 2021. Please, request individual trainings using training@nanolab.dtu.dk</span>
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| !Location
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| '''Theoretical part'''
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| * The location of the "questions and exercises" session is room 121A in building 345C. | |
| '''Practical part'''
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| * The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
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| !Qualified Prerequisites
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| * Cleanroom [http://www.nanolab.dtu.dk/english/education/courses/introduction-course Introduction course] at DTU Nanolab
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| * Admission to the cleanroom must be obtained before the training session | |
| * Theoretical part must be completed before the training session. | |
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| !Preparations
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| '''Before the "questions and exercises" session'''
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| * Read [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography] (Available online from DTU campus).
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| * Watch the [https://www.youtube.com/watch?v=hMgpRSOokxE&list=PLjWVU97LayHCHDueZ8qdT1LXJLGr4wLOa lecture videos] (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos. | |
| '''Before training session'''
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| * Complete the theoretical part (Q&E)
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| * Watch the [https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5 training videos] of spin coating (automatic), exposure (operation + alignment), and development (automatic).
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| * Study the equipment manuals. The manuals are available in [http://labmanager.danchip.dtu.dk LabManager].
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| * Study the [[LabAdviser/Courses/TPT_Lithography#Material_for_preparations_and_further_information|TPT process flows]] (first print + alignment).
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| '''Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below.'''
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| !Course Responsible
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| The Lithography Group at DTU Nanolab [mailto:lithography@nanolab.dtu.dk lithography@nanolab.dtu.dk].
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| Sign up for the course using Doodle (links under schedule).
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| !Learning Objectives | | !Learning Objectives |
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| * Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
| | Learn about the fundamentals of lithographic processing in a cleanroom: |
| * Authorization to use spin coater, mask aligner, and developer at DTU Nanolab | | * Coating |
| * Calculate relevant process parameters | | * Exposure |
| * Analyze and apply your results of lithographic processing | | * Development |
| | * Post-processing |
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| <br clear="all" /> | | <br clear="all" /> |
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| ===Material for preparations and further information=== | | ===Extra material for preparations and further information=== |
| {| style="color: black;" width="90%" | | {| style="color: black;" width="90%" |
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| '''<big>Literature</big>''' | | '''<big>Extra literature</big>''' |
| *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Franssila, 2010, Chapter 9: Optical Lithography]
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| *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography] | | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography] |
| *[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] | | *[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals] |
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| '''<big>Lecture videos</big>''' | | '''<big>Lecture videos</big>''' |
| <br/>7 videos, 2:41 hours in total
| | *No extra videos |
| *[https://www.youtube.com/watch?v=hMgpRSOokxE&list=PLjWVU97LayHCHDueZ8qdT1LXJLGr4wLOa Playlist On YouTube]
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| <!--*[http://podcast.llab.dtu.dk/index.php?id=302 On DTU Podcasts]-->
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| '''<big>Lecture slides</big>''' | | '''<big>Lecture slides</big>''' |
| *[[:Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]] | | *No extra slides |
| *[[:Media:Litho_Tool_Package_-_Spin_coating.pdf|TPT slides: Spin Coating]]
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| *[[:Media:Litho_Tool_Package_-_Exposure.pdf|TPT slides: UV Exposure]]
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| *[[:Media:Litho_Tool_Package_-_Development.pdf|TPT slides: Development]]
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| *[[:Media:Litho_Tool_Package_-_Post_processing.pdf|TPT slides: Post-processing]]
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| *[[:Media:Litho_Tool_Package_-_Process_effects_and_examples.pdf|TPT slides: Process Effects and Examples]]
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| '''<big>Training videos</big>'''
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| *[https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5 Lithography TPT training videos (Playlist)]
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| *[https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV Maskless aligner training videos (Playlist)]
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| *[https://www.youtube.com/watch?v=_neUkDsQhsM Spin Coater: Labspin (manual spin coater)]
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| *[https://www.youtube.com/watch?v=btinNzYnLnY Developer: TMAH Manual]
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| <!--
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| On DTU Podcasts:
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Training Video: UV Mask Aligner Part I (Operation)]
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part2_aligning-720p.mp4 Training Video: UV Mask Aligner Part II (Alignment)]
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.050_Developer_TMAH_UV-Lithography-720p.mp4 Training Video: Automatic Puddle Developer]
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| *[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer]
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| '''<big>Manuals</big>'''
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| *Automatic Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 Spin Coater: Gamma UV]
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| <!--*Manual Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 Spin Coater: Manual Standard Resists] -->
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| *UV Mask Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=339 Aligner: MA6 - 2]
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| *Maskless Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=440 Aligner: Maskless 02] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=464 Aligner: Maskless 03]
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| *Automatic Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=329 Developer: TMAH UV-lithography]
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| <!--*Manual Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 Developer: TMAH Manual] -->
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| '''<big>Process Flows</big>'''
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| *[[:Media:Process_Flow_TPT_first_print_v2.pdf|TPT first print process flow]]
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| *[[:Media:Process_Flow_TPT_alignment_v2.pdf|TPT alignment process flow]]
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| |} | | |} |
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