Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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When running any recipe on the SPTS Pro software, a set of process parameters are recorded (defined in the logging recipe that can be modified like any other recipe) as the process runs. This data can be accessed later by looking up the datalog. During the process itself, one can also activate the 'Trace' to monitor the process parameters in real time. To the left in the figure below, some of the most important process parameters are shown for a process run of the recipe Process A. | When running any recipe on the SPTS Pro software, a set of process parameters are recorded (defined in the logging recipe that can be modified like any other recipe) as the process runs. This data can be accessed later by looking up the datalog. During the process itself, one can also activate the 'Trace' to monitor the process parameters in real time. To the left in the figure below, some of the most important process parameters are shown for a process run of the recipe Process A. | ||
<gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2"> | <gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2"> | ||
image:Process A SPTS.png | Left: Recorded with the SPTS software | image:Process A SPTS.png | Left: Recorded with the SPTS software | ||
image:Process A pico.png | Right: Recorded with the Picoscope | image:Process A pico.png | Right: Recorded with the Picoscope | ||
</gallery> | </gallery> | ||
One can see the multiplexing of the Bosch process by alternation of the gas flows of | |||
<span style="color:#FFFFFF; background:blue">SF<sub>6</sub></span> and <span style="background:red">C<sub>4</sub>F<sub>8</sub></span> | |||
<gallery caption="4 cycles of Process D4 " widths="400" heights="500" perrow="2"> | <gallery caption="4 cycles of Process D4 " widths="400" heights="500" perrow="2"> | ||
Image:PrD4 SPTS.png | Left: Recorded with the SPTS software | Image:PrD4 SPTS.png | Left: Recorded with the SPTS software | ||
Revision as of 19:04, 17 March 2020
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Process optimization using the Picoscope
The original standard recipes on Pegasus 1 differ in many ways. The second step of one of them is listed below:
| Process A Step 2 parameters | ||
|---|---|---|
| Parameter | Etch | Dep |
| Gas flow (sccm) | SF6 350 (1.5 s), 550 | C4F8 200 |
| Cycle time (secs) | 7.0 | 4.0 |
| Pressure (mtorr) | 25 (1.5 s), 150 | 25 |
| Coil power (W) | 2800 | 2000 |
| Platen power (W) | 140 (1.5) 45 | 0 |
| Common | Temperature 20 degs | |
When running any recipe on the SPTS Pro software, a set of process parameters are recorded (defined in the logging recipe that can be modified like any other recipe) as the process runs. This data can be accessed later by looking up the datalog. During the process itself, one can also activate the 'Trace' to monitor the process parameters in real time. To the left in the figure below, some of the most important process parameters are shown for a process run of the recipe Process A.
- 4 cycles of Process A
Left: Recorded with the SPTS software
Right: Recorded with the Picoscope
One can see the multiplexing of the Bosch process by alternation of the gas flows of SF6 and C4F8
- 4 cycles of Process D4
Left: Recorded with the SPTS software
Right: Recorded with the Picoscope
