Specific Process Knowledge/Thermal Process/Oxidation/Oxidation on III-V oxidation furnace (C2): Difference between revisions
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'''Wet oxidation''': Time: variable | '''Wet oxidation''': Time: variable | ||
'''Open''' | '''Open''' Automatically opens after the oxidation time reaches | ||
'''Unload samples''' | '''Unload samples''' | ||
Revision as of 12:10, 23 August 2019
THIS PAGE IS UNDER CONSTRUCTION
Flow440 recipe
Standby: N2 purge at 3 SLM and Standby temperature at 440C
LM-LOCK: Check LabManager
Wet stabilize: N2 through bubbler at 1.5 SLM for 20 min and then wait for operator to open the furnace
Open
Load samples
Close
Wet oxidation: Time: variable
Open Automatically opens after the oxidation time reaches
Unload samples