Specific Process Knowledge/Thermal Process/Oxidation/Oxidation on III-V oxidation furnace (C2): Difference between revisions
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'''Standby''': N2 purge at 3 SLM and Standby temperature at 440C | '''Standby''': N2 purge at 3 SLM and Standby temperature at 440C | ||
LM-LOCK: Check LabManager | '''LM-LOCK''': Check LabManager | ||
Wet stabilize: N2 through bubbler at 1.5 SLM for 20 min and then wait for operator to open the furnace | '''Wet stabilize''': N2 through bubbler at 1.5 SLM for 20 min and then wait for operator to open the furnace | ||
Open | '''Open''' | ||
Load samples | '''Load samples''' | ||
Close | '''Close''' | ||
Wet oxidation: Time: variable | '''Wet oxidation''': Time: variable | ||
Open | '''Open''' | ||
Unload samples | '''Unload samples''' | ||
Revision as of 15:33, 16 August 2019
THIS PAGE IS UNDER CONSTRUCTION
Flow440 recipe
Standby: N2 purge at 3 SLM and Standby temperature at 440C
LM-LOCK: Check LabManager
Wet stabilize: N2 through bubbler at 1.5 SLM for 20 min and then wait for operator to open the furnace
Open
Load samples
Close
Wet oxidation: Time: variable
Open
Unload samples