Specific Process Knowledge/Thermal Process/Oxidation/Oxidation on III-V oxidation furnace (C2): Difference between revisions
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=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>= | =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>= | ||
'''Flow440''' recipe | =='''Flow440''' recipe== | ||
Standby: N2 purge at 3 SLM and Standby temperature at 440C | '''Standby''': N2 purge at 3 SLM and Standby temperature at 440C | ||
LM-LOCK: Check LabManager | LM-LOCK: Check LabManager | ||
Revision as of 15:31, 16 August 2019
THIS PAGE IS UNDER CONSTRUCTION
Flow440 recipe
Standby: N2 purge at 3 SLM and Standby temperature at 440C
LM-LOCK: Check LabManager
Wet stabilize: N2 through bubbler at 1.5 SLM for 20 min and then wait for operator to open the furnace
Open
Load samples
Close
Wet oxidation: Time: variable
Open
Unload samples