Specific Process Knowledge/Thermal Process/Oxidation/Oxidation on III-V oxidation furnace (C2): Difference between revisions
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LM-LOCK: Check LabManager | LM-LOCK: Check LabManager | ||
Wet stabilize: N2 through bubbler at 1.5 SLM | Wet stabilize: N2 through bubbler at 1.5 SLM, Time: 20 min, Wait for operator | ||
Open | Open | ||
Load samples | Load samples | ||
Close | Close | ||
Wet oxidation | Wet oxidation: Time: variable | ||
Time: variable | |||
Open | Open | ||
Unload samples | Unload samples | ||
Revision as of 15:29, 16 August 2019
THIS PAGE IS UNDER CONSTRUCTION
Flow440 recipe
Standby:N2 purge at 3 SLM and Standby temperature at 440C
LM-LOCK: Check LabManager
Wet stabilize: N2 through bubbler at 1.5 SLM, Time: 20 min, Wait for operator
Open
Load samples
Close
Wet oxidation: Time: variable
Open
Unload samples