Specific Process Knowledge/Thermal Process/Oxidation/Oxidation on III-V oxidation furnace (C2): Difference between revisions
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'''Flow440''' recipe | |||
Standby:N2 purge at 3 SLM and Standby temperature at 440C | |||
LM-LOCK: Check LabManager | |||
Wet stabilize: N2 through bubbler at 1.5 SLM | |||
Time: 20 min | |||
Wait for operator | |||
Open | |||
Load samples | |||
Close | |||
Wet oxidation | |||
Time: variable | |||
Open | |||
Unload samples | |||
Revision as of 15:29, 16 August 2019
THIS PAGE IS UNDER CONSTRUCTION
Flow440 recipe
Standby:N2 purge at 3 SLM and Standby temperature at 440C
LM-LOCK: Check LabManager
Wet stabilize: N2 through bubbler at 1.5 SLM
Time: 20 min
Wait for operator
Open Load samples Close
Wet oxidation Time: variable
Open Unload samples