Specific Process Knowledge/Characterization/XRD: Difference between revisions

Revision as of 12:46, 9 July 2018

Feedback to this page: click here

XRD SmartLab

The Rigaku SmartLab is an advanced XRD for measuring on thin films. All thin films can be measured without fixating the sample, as the system has a so called In-Plane arm.

File:Cluster1.jpg

Image(s) of the equipment(s)

The user manual(s), user APV(s), technical information, and contact information can be found in LabManager:

XRD SmartLab in LabManager

Process information

Link to process pages - e.g. one page for each material

Example:

Equipment performance and process related parameters

Equipment		Equipment 1
Purpose		Purpose 1 Purpose 2
Performance	Response 1	Performance range 1 Performance range 2
Performance	Response 2	Performance range
Process parameter range	Parameter 1	Range
Process parameter range	Parameter 2	Range
Substrates	Batch size	# small samples # 50 mm wafers # 100 mm wafers # 150 mm wafers
	Allowed materials	Allowed material 1 Allowed material 2

@@ Line 29: / Line 29: @@
 !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
 |style="background:WhiteSmoke; color:black"|<b>Equipment 1</b>
-|style="background:WhiteSmoke; color:black"|<b>Equipment 2</b>
 |-
 !style="background:silver; color:black;" align="center" width="60"|Purpose
@@ Line 36: / Line 35: @@
 *Purpose 1
 *Purpose 2
-|style="background:WhiteSmoke; color:black"|
-*Purpose 1
-*Purpose 2
-*Purpose 3
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance
-|style="background:LightGrey; color:black"|Response 1
+|style="background:LightGrey; color:black"|
-|style="background:WhiteSmoke; color:black"|
+Response 1
-*Performance range 1
-*Performance range 2
 |style="background:WhiteSmoke; color:black"|
 *Performance range 1
 *Performance range 2
-*Performance range 3
 |-
-|style="background:LightGrey; color:black"|Response 2
+|style="background:LightGrey; color:black"|
-|style="background:WhiteSmoke; color:black"|
+Response 2
-*Performance range
 |style="background:WhiteSmoke; color:black"|
 *Performance range
@@ Line 59: / Line 50: @@
 !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range
 |style="background:LightGrey; color:black"|Parameter 1
-|style="background:WhiteSmoke; color:black"|
-*Range
 |style="background:WhiteSmoke; color:black"|
 *Range
 |-
 |style="background:LightGrey; color:black"|Parameter 2
-|style="background:WhiteSmoke; color:black"|
-*Range
 |style="background:WhiteSmoke; color:black"|
 *Range
@@ Line 77: / Line 64: @@
 *<nowiki>#</nowiki> 100 mm wafers
 *<nowiki>#</nowiki> 150 mm wafers
-|style="background:WhiteSmoke; color:black"|
-*<nowiki>#</nowiki> small samples
-*<nowiki>#</nowiki> 50 mm wafers
-*<nowiki>#</nowiki> 100 mm wafers
-*<nowiki>#</nowiki> 150 mm wafers
 |-
 | style="background:LightGrey; color:black"|Allowed materials
@@ Line 87: / Line 69: @@
 *Allowed material 1
 *Allowed material 2
-|style="background:WhiteSmoke; color:black"|
-*Allowed material 1
-*Allowed material 2
-*Allowed material 3
 |-
 |}
 <br clear="all" />