Specific Process Knowledge/Characterization/Probe station: Difference between revisions

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The Four-Point Probe is a Veeco FPP-5000 for I/V measurement. The main purpose is to measure resistance and resistivity on a 4" silicon wafer. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer.  
The Probe station is a - EPS150Triax - Cascade for I/V measurement, ohmic measurements etc, it has 4 individually adjustable probes, but can be fitted with more. It has several source meters, multi meters and a computer attached.


The wafer are pushed down on the four pins so a measurement is performed. It works only for 4" wafers because a special holder is need. 
It can be used from pieces up to 6" wafers  
[[Image:probestation.jpg|thumb|300x300px|Probe station: positioned in Service room CX1]]
[[Image:probestation.jpg|thumb|300x300px|Probe station: positioned in Service room CX1]]


Revision as of 13:49, 21 June 2017

Probe Station

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The Probe station is a - EPS150Triax - Cascade for I/V measurement, ohmic measurements etc, it has 4 individually adjustable probes, but can be fitted with more. It has several source meters, multi meters and a computer attached.

It can be used from pieces up to 6" wafers

File:Probestation.jpg
Probe station: positioned in Service room CX1

The user manual, technical information and contact information can be found in LabManager:

Probe station

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