Template:Maximus: AZ5214E: Difference between revisions
New page: Maximus can be used for spinning on 2", 4" and 6" substrates. Right now we only have few recipes for the standard thicknesses, but we are working at it. Please address you suggestions to P... |
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Maximus can be used for spinning on 2", 4" and 6" substrates. | Maximus can be used for spinning on 2", 4" and 6" substrates. | ||
Right now we only have few recipes for the standard thicknesses, but we are working at it. Please address you suggestions to Photolith Team in case you have some special needs. | Right now we only have few recipes for the standard thicknesses, but we are working at it. Please address you suggestions to Photolith. Team in case you have some special needs. | ||
* for 4" substrates 1 | * for 4" substrates 1.5µm resist use flow 1.5 4inch | ||
* for 6" substrates 1 | * for 6" substrates 1.5µm resist use flow 1.5 6inch | ||
For the flow description read this [[media:Maximus_recipe_for_1,5um_resist.doc|document]]. | |||
Latest revision as of 10:47, 6 March 2008
Maximus can be used for spinning on 2", 4" and 6" substrates. Right now we only have few recipes for the standard thicknesses, but we are working at it. Please address you suggestions to Photolith. Team in case you have some special needs.
- for 4" substrates 1.5µm resist use flow 1.5 4inch
- for 6" substrates 1.5µm resist use flow 1.5 6inch
For the flow description read this document.