Recent changes
Track the most recent changes to the wiki on this page.
List of abbreviations:
- N
- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
- b
- This edit was performed by a bot
- (±123)
- The page size changed by this number of bytes
18 September 2024
|
|
14:56 | Specific Process Knowledge/Lithography/UVLithography 2 changes history +105 [Jehem (2×)] | |||
|
|
14:56 (cur | prev) +42 Jehem talk contribs (→Getting started) | ||||
|
|
14:56 (cur | prev) +63 Jehem talk contribs (→Getting started) | ||||
| 11:34 | LabAdviser/Courses diffhist +105 Jehem talk contribs | ||||
| 11:32 | Specific Process Knowledge/Lithography diffhist −70 Jehem talk contribs (→Lithography Tool Package Training) | ||||
17 September 2024
|
|
11:56 | Specific Process Knowledge/Lithography/EBeamLithography/Cassettes 4 changes history 0 [Thope (4×)] | |||
|
|
11:56 (cur | prev) 0 Thope talk contribs (→Cassette overview) | ||||
|
|
11:55 (cur | prev) 0 Thope talk contribs (→Cassette overview) | ||||
|
|
11:55 (cur | prev) 0 Thope talk contribs (→Cassette overview) | ||||
|
|
11:53 (cur | prev) 0 Thope talk contribs (→Cassette overview) | ||||
| 11:34 | Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE diffhist +382 Mfarin talk contribs (→CF4/H2 chemistry - SiO2 etch) | ||||
12 September 2024
|
|
13:33 | Specific Process Knowledge/Lithography/EBeamLithography/Cassettes 8 changes history +760 [Thope (8×)] | |||
|
|
13:33 (cur | prev) +677 Thope talk contribs (→Cassette overview) | ||||
|
|
13:25 (cur | prev) +3 Thope talk contribs (→Cassette overview) | ||||
|
|
13:25 (cur | prev) +12 Thope talk contribs (→Cassette overview) | ||||
|
|
13:24 (cur | prev) +18 Thope talk contribs (→Cassette overview) | ||||
|
|
13:24 (cur | prev) +2 Thope talk contribs (→Cassette overview) | ||||
|
|
13:23 (cur | prev) +1 Thope talk contribs (→Cassette overview) | ||||
|
|
13:23 (cur | prev) +3 Thope talk contribs (→Cassette overview) | ||||
|
|
13:23 (cur | prev) +44 Thope talk contribs (→Cassette overview) | ||||
11 September 2024
|
|
11:43 | Specific Process Knowledge/Overview of Fume Hoods 4 changes history +46 [Mbec (4×)] | |||
|
|
11:43 (cur | prev) +13 Mbec talk contribs | ||||
|
|
10:23 (cur | prev) +6 Mbec talk contribs | ||||
|
|
10:22 (cur | prev) −6 Mbec talk contribs | ||||
|
|
10:22 (cur | prev) +33 Mbec talk contribs | ||||
|
|
10:36 | (Upload log) [Mbec (2×)] | |||
|
|
10:36 Mbec talk contribs uploaded File:Fume hoods1.jpg | ||||
|
|
10:28 Mbec talk contribs uploaded File:FumehoodsOverview1.jpg | ||||
10 September 2024
|
|
15:38 | Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF) 2 changes history +441 [Kabi (2×)] | |||
|
|
15:38 (cur | prev) +493 Kabi talk contribs | ||||
|
|
15:31 (cur | prev) −52 Kabi talk contribs | ||||
| 14:35 | Specific Process Knowledge/Overview of Fume Hoods diffhist −190 Kabi talk contribs | ||||
6 September 2024
|
|
11:31 | Specific Process Knowledge/Characterization/Optical characterization 2 changes history +11 [Bghe (2×)] | |||
|
|
11:31 (cur | prev) +10 Bghe talk contribs (→A rough overview of the performance of the Ellipsometers) | ||||
|
|
11:30 (cur | prev) +1 Bghe talk contribs (→More details) | ||||
5 September 2024
| 11:41 | Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE diffhist +2 Bghe talk contribs | ||||
2 September 2024
|
|
09:01 | (Deletion log) [Bghe (2×)] | |||
|
|
09:01 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/DiamondCVD (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/DiamondCVD click here]''' <i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b></i> == SEKI Diamond CVD - this machine is being decommissioned (2024) ==") | ||||
|
|
09:01 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/DiamondCVD/Diamond CVD process details (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/DiamondCVD/Diamond_CVD_process_details click here]''' ''All contents by DTU Nanolab staff unless otherwise noted.'' =Diamond growth is no longer possible at Nanolab=", and the only contributor was "Reet" (talk)) | ||||
30 August 2024
| 12:07 | Specific Process Knowledge/Thermal Process/Oxidation/Wet oxidation C1 furnace diffhist +785 Pevo talk contribs | ||||
29 August 2024
| 13:41 | Specific Process Knowledge/Thermal Process/RTP Jipelec 2 diffhist 0 Indiogo talk contribs (→Samples and Process Specifications) | ||||
|
|
10:43 | Specific Process Knowledge/Thin film deposition 2 changes history −23 [Reet (2×)] | |||
|
|
10:43 (cur | prev) +7 Reet talk contribs (→Choose deposition equipment) | ||||
|
|
10:41 (cur | prev) −30 Reet talk contribs (→Choose material to deposit) | ||||