Sputtering of Ti in Wordentec: Revision history

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7 April 2014

8 September 2009

  • curprev 11:5811:58, 8 September 2009Kn talk contribs 250 bytes +250 New page: == Deposition rate == The deposition rate will change with the settings for pressure and effect. '''Pressure <math>1*10^{-2}</math> mbar, Effect 300 W''' The rate is established to b...