LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition/TIO ALU Gratings Procces flow: Revision history

View logs for this page

Jump to navigation Jump to search

Diff selection: Mark the radio buttons of the revisions to compare and hit enter or the button at the bottom.
Legend: (cur) = difference with latest revision, (prev) = difference with preceding revision, m = minor edit.

curprev 14:4314:43, 2 February 2023‎ Eves talk contribs‎ 7,129 bytes −1‎ No edit summary

curprev 18:5518:55, 1 February 2023‎ Eves talk contribs‎ 7,130 bytes +636‎ No edit summary

curprev 13:5413:54, 3 October 2021‎ Eves talk contribs‎ 6,494 bytes 0‎ →‎Procces flow description

curprev 13:2013:20, 10 July 2019‎ Eves talk contribs‎ 6,494 bytes −1‎ →‎Procces flow description
curprev 13:2013:20, 10 July 2019‎ Eves talk contribs‎ 6,495 bytes +1‎ →‎Procces flow description

curprev 18:5718:57, 14 March 2017‎ Eves talk contribs‎ 6,494 bytes −910‎ →‎Procces flow description
curprev 18:4818:48, 14 March 2017‎ Eves talk contribs‎ 7,404 bytes −77‎ →‎Process flow

curprev 23:1123:11, 23 June 2016‎ Eves talk contribs‎ 7,481 bytes +70‎ →‎Process flow
curprev 23:0823:08, 23 June 2016‎ Eves talk contribs‎ 7,411 bytes +1‎ →‎Process flow
curprev 23:0823:08, 23 June 2016‎ Eves talk contribs‎ 7,410 bytes +74‎ →‎Process flow

curprev 17:1017:10, 31 May 2016‎ Eves talk contribs‎ 4,850 bytes +4,850‎ Created page with "====Procces flow description==== The substrates for the samples were fabricated by depositing 1 μm of Si<sub>3</sub>N<sub>4</sub> (the resonator layer) on 100 mm silicon < 1..."

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=LabAdviser/Technology_Research/Fabrication_of_Hyperbolic_Metamaterials_using_Atomic_Layer_Deposition/TIO_ALU_Gratings_Procces_flow"