Specific Process Knowledge/Thermal Process/Oxidation/Oxidation on III-V oxidation furnace (C2)
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THIS PAGE IS UNDER CONSTRUCTION
Unless otherwise stated, this page is written by DTU Nanolab internal
The furnace is being tested.
Flow440 recipe
Standby: N2 purge at 3 SLM and Standby temperature at 440C
LM-LOCK: Check LabManager
Wet stabilize: N2 through bubbler at 1.5 SLM for 20 min and then wait for operator to open the furnace
Open
Load samples
Close
Wet oxidation: Time: variable
Open: Automatically opens after the oxidation time reaches
Unload samples