Template:Spinning Track1

Track1 can be used to spin the standard thicknesses. You can use the recipes in the list below:

• PR1_5 for 1,5 um resist thickness
• PR2_2 for 2,2 um resist thickness
• PR4_2_BAKE for 4,2 um resist thickness

If you want to see parameters for those spins please refer to this document: Parameters from Track1.

Other thin resist recepes on Track1. Please notice that we do not make quality control resist thickness measurements on these recipes:

• PR1_2
• KT1_2
• JTC2_8
• JTC3_3
• JTC3_6
• JTC4_2