Template:Spinning KS Spinner: AZ

From LabAdviser

KS Spinner is the other option for spinning the standard thicknesses.

  • 1.5µm resist use the recipe: Danchip_1.5um_4"and6"
  • 2.2µm resist use the recipe: Danchip2_2_4"

Please see the parameters for these recipes and some other suggestions in this document:Thin resist parameters

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