Specific Process Knowledge/Wafer cleaning: Revision history

7 March 2014

• curprev 15:5715:57, 7 March 2014‎ Kabi talk contribs‎ 4,100 bytes −2‎ →‎Wafers that go into the high temperature furnaces
• curprev 15:1215:12, 7 March 2014‎ Bghe talk contribs‎ 4,102 bytes +24‎ →‎Cleaning of wafers
• curprev 15:1015:10, 7 March 2014‎ Bghe talk contribs‎ 4,078 bytes +9‎ →‎Cleaning of wafers
• curprev 15:0215:02, 7 March 2014‎ Bghe talk contribs‎ 4,069 bytes −2‎ →‎Cleaning of wafers
• curprev 15:0115:01, 7 March 2014‎ Bghe talk contribs‎ 4,071 bytes +2‎ →‎Cleaning of wafers
• curprev 15:0015:00, 7 March 2014‎ Bghe talk contribs‎ 4,069 bytes −24‎ →‎Wafers that go into the high temperature furnaces
• curprev 14:5914:59, 7 March 2014‎ Bghe talk contribs‎ 4,093 bytes 0‎ →‎Wafers that go into the high temperature furnaces
• curprev 14:5814:58, 7 March 2014‎ Bghe talk contribs‎ 4,093 bytes −6‎ →‎Cleaning of wafers
• curprev 14:5714:57, 7 March 2014‎ Bghe talk contribs‎ 4,099 bytes +47‎ →‎Cleaning of wafers
• curprev 14:5714:57, 7 March 2014‎ Bghe talk contribs‎ 4,052 bytes +7‎ →‎Cleaning of wafers
• curprev 14:5714:57, 7 March 2014‎ Bghe talk contribs‎ 4,045 bytes +1‎ →‎Cleaning of wafers
• curprev 14:5614:56, 7 March 2014‎ Bghe talk contribs‎ 4,044 bytes +5‎ →‎Cleaning of wafers
• curprev 14:5614:56, 7 March 2014‎ Bghe talk contribs‎ 4,039 bytes +27‎ →‎Cleaning of wafers
• curprev 14:5214:52, 7 March 2014‎ Bghe talk contribs‎ 4,012 bytes +242‎ →‎Cleaning of wafers
• curprev 14:4814:48, 7 March 2014‎ Bghe talk contribs‎ 3,770 bytes +25‎ →‎Cleaning of wafers

4 March 2014

• curprev 15:0815:08, 4 March 2014‎ Kabi talk contribs‎ 3,745 bytes +1‎ →‎Comparison of Wafer Cleaning Methods
• curprev 15:0815:08, 4 March 2014‎ Kabi talk contribs‎ 3,744 bytes −30‎ →‎Comparison of Wafer Cleaning Methods
• curprev 15:0815:08, 4 March 2014‎ Kabi talk contribs‎ 3,774 bytes +3‎ →‎Comparison of Wafer Cleaning Methods
• curprev 15:0715:07, 4 March 2014‎ Kabi talk contribs‎ 3,771 bytes +100‎ →‎Comparison of Wafer Cleaning Methods
• curprev 15:0515:05, 4 March 2014‎ Kabi talk contribs‎ 3,671 bytes +48‎ →‎Comparison of Wafer Cleaning Methods
• curprev 15:0315:03, 4 March 2014‎ Kabi talk contribs‎ 3,623 bytes +26‎ →‎Cleaning of wafers
• curprev 15:0115:01, 4 March 2014‎ Kabi talk contribs‎ 3,597 bytes −1‎ →‎Cleaning of wafers
• curprev 15:0015:00, 4 March 2014‎ Kabi talk contribs‎ 3,598 bytes +5‎ →‎Cleaning of wafers
• curprev 14:5914:59, 4 March 2014‎ Kabi talk contribs‎ 3,593 bytes +4‎ →‎Cleaning of wafers
• curprev 14:5914:59, 4 March 2014‎ Kabi talk contribs‎ 3,589 bytes +1‎ →‎Cleaning of wafers
• curprev 14:5914:59, 4 March 2014‎ Kabi talk contribs‎ 3,588 bytes +67‎ →‎Cleaning of wafers
• curprev 14:5714:57, 4 March 2014‎ Kabi talk contribs‎ 3,521 bytes +838‎ →‎Cleaning of wafers

3 March 2014

• curprev 14:0114:01, 3 March 2014‎ Kabi talk contribs‎ 2,683 bytes 0‎ →‎Comparison of Wafer Cleaning Methods
• curprev 14:0114:01, 3 March 2014‎ Kabi talk contribs‎ 2,683 bytes 0‎ →‎Comparison of Wafer Cleaning Methods
• curprev 14:0114:01, 3 March 2014‎ Kabi talk contribs‎ 2,683 bytes 0‎ →‎Comparison of Wafer Cleaning Methods
• curprev 13:0313:03, 3 March 2014‎ Kabi talk contribs‎ 2,683 bytes +1‎ →‎Cleaning of wafers
• curprev 13:0213:02, 3 March 2014‎ Kabi talk contribs‎ 2,682 bytes 0‎ →‎Cleaning of wafers
• curprev 13:0113:01, 3 March 2014‎ Kabi talk contribs‎ 2,682 bytes +7‎ →‎Cleaning of wafers
• curprev 13:0113:01, 3 March 2014‎ Kabi talk contribs‎ 2,675 bytes −80‎ →‎70px Section under construction
• curprev 13:0013:00, 3 March 2014‎ Kabi talk contribs‎ 2,755 bytes +96‎ →‎Comparison of Wafer Cleaning Methods
• curprev 12:5812:58, 3 March 2014‎ Kabi talk contribs‎ 2,659 bytes 0‎ No edit summary
• curprev 12:5712:57, 3 March 2014‎ Kabi talk contribs‎ 2,659 bytes +23‎ →‎Clean with:
• curprev 11:5611:56, 3 March 2014‎ Kabi talk contribs‎ 2,636 bytes +1‎ →‎Comparison of Wafer Cleaning Methods
• curprev 11:4311:43, 3 March 2014‎ Kabi talk contribs‎ 2,635 bytes +39‎ →‎Comparison of Wafer Cleaning Methods
• curprev 11:2811:28, 3 March 2014‎ Kabi talk contribs‎ 2,596 bytes +68‎ →‎Comparison of Wafer Cleaning Methods
• curprev 11:2111:21, 3 March 2014‎ Kabi talk contribs‎ 2,528 bytes +1,951‎ No edit summary

11 October 2013

• curprev 13:5413:54, 11 October 2013‎ Bghe talk contribs‎ 577 bytes +204‎ No edit summary

11 February 2008

• curprev 12:1212:12, 11 February 2008‎ 192.38.87.73 talk‎ 373 bytes −81‎ No edit summary
• curprev 12:0712:07, 11 February 2008‎ 192.38.87.73 talk‎ 454 bytes −30‎ No edit summary
• curprev 12:0612:06, 11 February 2008‎ 192.38.87.73 talk‎ 484 bytes +1‎ No edit summary

18 October 2007

• curprev 08:2508:25, 18 October 2007‎ BGE talk contribs‎ 483 bytes −50‎ →‎Clean with:

12 October 2007

• curprev 13:2913:29, 12 October 2007‎ BGE talk contribs‎ m 533 bytes 0‎ Wafer cleaning moved to Specific Process Knowledge/Wafer cleaning

4 October 2007

• curprev 16:1316:13, 4 October 2007‎ BGE talk contribs‎ 533 bytes +341‎ No edit summary
• curprev 14:3514:35, 4 October 2007‎ 192.38.87.73 talk‎ 192 bytes −74‎ No edit summary

20 September 2007

• curprev 14:2814:28, 20 September 2007‎ 192.38.87.76 talk‎ 266 bytes +266‎ New page: == Clean with: == *RCA - ''two step process to remove organics and metals'' *7-up - ''piranha etch of wafers and masks - removes organiscs and alkali ions'' *BHF - ''etching of predep gla...