Specific Process Knowledge/Thin film deposition/PECVD: Revision history

6 May 2014

• curprev 10:3510:35, 6 May 2014‎ Bghe talk contribs‎ 6,685 bytes +495‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 10:1010:10, 6 May 2014‎ Bghe talk contribs‎ 6,190 bytes −40‎ →‎Process information on PECVD2, PECVD3 (and PECVD1:Expired!)

27 January 2014

• curprev 14:0314:03, 27 January 2014‎ Bghe talk contribs‎ 6,230 bytes +12‎ →‎Recipes on PECVD2, PECVD3 (and PECVD1:Expired!)
• curprev 14:0114:01, 27 January 2014‎ Bghe talk contribs‎ 6,218 bytes +19‎ →‎Recipes on PECVD1(will be removed soon), PECVD2 and PECVD3
• curprev 13:5713:57, 27 January 2014‎ Bghe talk contribs‎ 6,199 bytes +26‎ →‎Recipes on PECVD1(will be removed soon), PECVD2 and PECVD3
• curprev 13:5513:55, 27 January 2014‎ Bghe talk contribs‎ 6,173 bytes +36‎ →‎Recipes on PECVD1(will be removed soon), PECVD2 and PECVD3
• curprev 13:5213:52, 27 January 2014‎ Bghe talk contribs‎ 6,137 bytes +6‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 13:4813:48, 27 January 2014‎ Bghe talk contribs‎ 6,131 bytes 0‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 13:4613:46, 27 January 2014‎ Bghe talk contribs‎ 6,131 bytes −44‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 13:4313:43, 27 January 2014‎ Bghe talk contribs‎ 6,175 bytes 0‎ →‎Recipes on PECVD1(will be removed soon), PECVD2 and PECVD3
• curprev 13:4213:42, 27 January 2014‎ Bghe talk contribs‎ 6,175 bytes +20‎ →‎Recipes on PECVD1(will be removed soon), PECVD2 and PECVD3
• curprev 13:4113:41, 27 January 2014‎ Bghe talk contribs‎ 6,155 bytes −162‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 13:3813:38, 27 January 2014‎ Bghe talk contribs‎ 6,317 bytes +105‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 13:3513:35, 27 January 2014‎ Bghe talk contribs‎ 6,212 bytes +135‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 13:3213:32, 27 January 2014‎ Bghe talk contribs‎ 6,077 bytes +127‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 13:3013:30, 27 January 2014‎ Bghe talk contribs‎ 5,950 bytes 0‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 13:2413:24, 27 January 2014‎ Bghe talk contribs‎ 5,950 bytes +533‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 13:2113:21, 27 January 2014‎ Bghe talk contribs‎ 5,417 bytes +252‎ →‎Overview of the performance of PECVD thin films and some process related parameters

21 October 2013

• curprev 11:0111:01, 21 October 2013‎ Bghe talk contribs‎ 5,165 bytes +218‎ No edit summary

16 October 2013

• curprev 08:4608:46, 16 October 2013‎ Bghe talk contribs‎ 4,947 bytes +67‎ →‎Recipes on PECVD1(will be removed soon), PECVD2 and PECVD3
• curprev 08:4508:45, 16 October 2013‎ Bghe talk contribs‎ 4,880 bytes +67‎ →‎Recipes on PECVD1(will be removed soon), PECVD2 and PECVD3
• curprev 08:4408:44, 16 October 2013‎ Bghe talk contribs‎ 4,813 bytes +30‎ →‎Recipes on PECVD1 and PECVD3
• curprev 08:4208:42, 16 October 2013‎ Bghe talk contribs‎ 4,783 bytes +29‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 08:4108:41, 16 October 2013‎ Bghe talk contribs‎ 4,754 bytes +1‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 08:4008:40, 16 October 2013‎ Bghe talk contribs‎ 4,753 bytes +98‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition

25 October 2010

• curprev 11:5811:58, 25 October 2010‎ Tg talk contribs‎ 4,655 bytes −5‎ No edit summary

7 May 2008

• curprev 15:5415:54, 7 May 2008‎ Jml talk contribs‎ 4,660 bytes +38‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 15:2915:29, 7 May 2008‎ Jml talk contribs‎ 4,622 bytes +4‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 15:2815:28, 7 May 2008‎ Jml talk contribs‎ 4,618 bytes −2,655‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 15:2815:28, 7 May 2008‎ Jml talk contribs‎ 7,273 bytes +2‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 15:2515:25, 7 May 2008‎ Jml talk contribs‎ 7,271 bytes +2,402‎ No edit summary
• curprev 15:0915:09, 7 May 2008‎ Jml talk contribs‎ 4,869 bytes −16‎ →‎A rough overview of the performance of PECVD thin films and some process related parameters
• curprev 15:0715:07, 7 May 2008‎ Jml talk contribs‎ 4,885 bytes +1‎ →‎A rough overview of the performance of PECVD thin films and some process related parameters

13 December 2007

• curprev 11:5411:54, 13 December 2007‎ 192.38.87.76 talk‎ 4,884 bytes +54‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition

4 December 2007

• curprev 16:1416:14, 4 December 2007‎ BGE talk contribs‎ 4,830 bytes +338‎ →‎A rough overview of the performance of PECVD thin films and some process related parameters
• curprev 16:0116:01, 4 December 2007‎ BGE talk contribs‎ 4,492 bytes +238‎ →‎A rough overview of the performance of PECVD thin films and some process related parameters
• curprev 15:5115:51, 4 December 2007‎ BGE talk contribs‎ 4,254 bytes +2,173‎ No edit summary

3 December 2007

• curprev 15:2415:24, 3 December 2007‎ BGE talk contribs‎ 2,081 bytes +224‎ →‎Recipes on PECVD3
• curprev 15:2315:23, 3 December 2007‎ BGE talk contribs‎ 1,857 bytes +276‎ →‎Recipes on PECVD1
• curprev 15:2215:22, 3 December 2007‎ BGE talk contribs‎ 1,581 bytes −52‎ →‎Recipes on PECVD1
• curprev 15:2015:20, 3 December 2007‎ BGE talk contribs‎ 1,633 bytes +274‎ →‎Recipes on PECVD3
• curprev 15:1915:19, 3 December 2007‎ BGE talk contribs‎ 1,359 bytes +273‎ →‎Recipes on PECVD1
• curprev 15:0615:06, 3 December 2007‎ BGE talk contribs‎ 1,086 bytes +123‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition

22 October 2007

• curprev 14:5814:58, 22 October 2007‎ 192.38.87.76 talk‎ 963 bytes +437‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition

• curprev 14:4414:44, 22 October 2007‎ 192.38.87.76 talk‎ 526 bytes +526‎ New page: ==PECVD Plasma Enhanced Chemical Vapor Deposition== We have three PECVD's here at DANCHIP. They can all be used to deposit Silicon oxides and Silicon nitrides with or without dopants of Bo...