Specific Process Knowledge/Thin film deposition/PECVD: Revision history

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curprev 09:5309:53, 26 May 2023‎ Bghe talk contribs‎ 6,337 bytes +1‎ →‎Overview of the performance of PECVD thin films and some process related parameters

curprev 12:0112:01, 24 March 2023‎ Bghe talk contribs‎ 6,336 bytes −36‎ No edit summary

curprev 14:3614:36, 31 January 2023‎ Bghe talk contribs‎ 6,372 bytes +58‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
curprev 14:1414:14, 31 January 2023‎ Bghe talk contribs‎ 6,314 bytes +65‎ No edit summary

curprev 14:4614:46, 29 August 2022‎ Bghe talk contribs‎ 6,249 bytes +5‎ →‎Overview of the performance of PECVD thin films and some process related parameters
curprev 14:4614:46, 29 August 2022‎ Bghe talk contribs‎ 6,244 bytes +124‎ No edit summary
curprev 14:4414:44, 29 August 2022‎ Bghe talk contribs‎ 6,120 bytes +32‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
curprev 14:4314:43, 29 August 2022‎ Bghe talk contribs‎ 6,088 bytes +44‎ No edit summary

curprev 09:3909:39, 16 June 2020‎ Qugig talk contribs‎ 6,044 bytes +1‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition

curprev 11:0111:01, 7 January 2020‎ Bghe talk contribs‎ 6,043 bytes −75‎ →‎Process information on PECVD3 and PECVD4

curprev 14:1914:19, 25 November 2019‎ Jmli talk contribs‎ 6,118 bytes +4‎ No edit summary

curprev 12:5412:54, 27 June 2019‎ Bghe talk contribs‎ 6,114 bytes +137‎ →‎Process information on PECVD3 and PECVD4

curprev 08:3508:35, 19 June 2018‎ Bghe talk contribs‎ 5,977 bytes 0‎ No edit summary

curprev 07:5807:58, 3 May 2018‎ Bghe talk contribs‎ 7,082 bytes 0‎ →‎Overview of the performance of PECVD thin films and some process related parameters

curprev 15:3315:33, 7 March 2017‎ Bghe talk contribs‎ 7,082 bytes +6‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition

curprev 12:1312:13, 20 December 2016‎ Bghe talk contribs‎ 6,937 bytes +38‎ →‎Overview of the performance of PECVD thin films and some process related parameters
curprev 11:1011:10, 20 December 2016‎ Bghe talk contribs‎ 6,899 bytes +81‎ →‎Overview of the performance of PECVD thin films and some process related parameters
curprev 11:0911:09, 20 December 2016‎ Bghe talk contribs‎ 6,818 bytes +798‎ →‎Overview of the performance of PECVD thin films and some process related parameters
curprev 09:2709:27, 20 December 2016‎ Bghe talk contribs‎ 6,020 bytes +70‎ →‎Process information on PECVD2 and PECVD3

curprev 14:1314:13, 29 November 2016‎ Jmli talk contribs‎ 5,950 bytes −3,418‎ No edit summary
curprev 14:1214:12, 29 November 2016‎ Jmli talk contribs‎ 9,368 bytes −25‎ No edit summary
curprev 14:1014:10, 29 November 2016‎ Jmli talk contribs‎ 9,393 bytes +3,394‎ No edit summary

curprev 13:3313:33, 19 April 2016‎ Bghe talk contribs‎ 5,999 bytes +3‎ →‎Overview of the performance of PECVD thin films and some process related parameters

curprev 11:0611:06, 24 November 2015‎ Bghe talk contribs‎ 5,996 bytes +31‎ →‎Process information on PECVD2 and PECVD3

curprev 08:3908:39, 22 June 2015‎ Bghe talk contribs‎ 5,965 bytes −15‎ →‎Overview of the performance of PECVD thin films and some process related parameters

curprev 15:1215:12, 25 August 2014‎ Bghe talk contribs‎ 5,980 bytes +10‎ No edit summary
curprev 14:2514:25, 25 August 2014‎ Bghe talk contribs‎ 5,970 bytes +12‎ No edit summary
curprev 14:0514:05, 25 August 2014‎ Bghe talk contribs‎ 5,958 bytes +59‎ No edit summary

curprev 11:0111:01, 21 October 2013‎ Bghe talk contribs‎ 5,165 bytes +218‎ No edit summary

curprev 11:5811:58, 25 October 2010‎ Tg talk contribs‎ 4,655 bytes −5‎ No edit summary

curprev 11:5411:54, 13 December 2007‎ 192.38.87.76 talk‎ 4,884 bytes +54‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition

curprev 16:1416:14, 4 December 2007‎ BGE talk contribs‎ 4,830 bytes +338‎ →‎A rough overview of the performance of PECVD thin films and some process related parameters
curprev 16:0116:01, 4 December 2007‎ BGE talk contribs‎ 4,492 bytes +238‎ →‎A rough overview of the performance of PECVD thin films and some process related parameters
curprev 15:5115:51, 4 December 2007‎ BGE talk contribs‎ 4,254 bytes +2,173‎ No edit summary

curprev 14:5814:58, 22 October 2007‎ 192.38.87.76 talk‎ 963 bytes +437‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition

curprev 14:4414:44, 22 October 2007‎ 192.38.87.76 talk‎ 526 bytes +526‎ New page: ==PECVD Plasma Enhanced Chemical Vapor Deposition== We have three PECVD's here at DANCHIP. They can all be used to deposit Silicon oxides and Silicon nitrides with or without dopants of Bo...

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