Specific Process Knowledge/Thin film deposition/Gadolinium Cerium Oxide
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Revision as of 18:45, 7 February 2024 by Eves (talk | contribs) (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Gadolinium_Cerium_Oxide click here]''' ''All text by Nanolab staff'' <br clear="all" /> == Deposition of Gadolinium Cerium Oxide == Thin films of Gadolinium Cerium Oxide (Gd<sub>0.2</sub>Ce<sub>0.8</sub>O<sub>2</sub>) can be deposited using RF sputtering. In this process, the ma...")
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All text by Nanolab staff
Deposition of Gadolinium Cerium Oxide
Thin films of Gadolinium Cerium Oxide (Gd0.2Ce0.8O2) can be deposited using RF sputtering. In this process, the main parameters are temperature and additional oxygen, which can be adjusted to tailor the properties of the deposited films. The target is a solid ceramic 75 mm (0.125" thickness) GCO target bonded to a Cu plate.
GCO sputtering in Sputter-System Metal-Oxide (PC1)
Sputter-System Metal-Oxide (PC1)/Sputter-System Metal-Nitride (PC3) | |
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Process Temperature |
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